Zobrazeno 1 - 10
of 43
pro vyhledávání: '"Rainer Köning"'
Autor:
Philipp-Immanuel Schneider, Phillip Manley, Jan Krüger, Lin Zschiedrich, Rainer Köning, Bernd Bodermann, Sven Burger
Publikováno v:
Optics and Photonics for Advanced Dimensional Metrology II.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::192adfb58875a29b45f8b3e5592e8e4c
https://doi.org/10.1117/12.2620762
https://doi.org/10.1117/12.2620762
Publikováno v:
Applied Optics. 62:756
In this contribution, we present a technique for in situ determination of the numerical apertures (NAs) of optical microscopes using calibrated diffraction gratings. Many commonly practiced procedures use an external setup to determine the objective
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::19a5b354272bf00c40d88c326a90e15b
https://doi.org/10.1364/ao.472223
https://doi.org/10.1364/ao.472223
Publikováno v:
Computational Optics 2021.
A model-based edge detection is always required when quantitatively evaluating the bidirectional measurements of micro- and nanostructures in optical microscopy. For example, the accurate determination of the width of a structure requires the knowled
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4b7893cf8aa9b19dd6d591a8a16d2104
https://doi.org/10.1117/12.2600086
https://doi.org/10.1117/12.2600086
Publikováno v:
Modeling Aspects in Optical Metrology VIII.
In light microscopy, optical aberrations always affect the performance of the employed microscope. They can emerge from imperfect optical components of the microscope, like lenses, or from misalignments of such optical components, which may even chan
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8d997fa80bcc83f1293c4d5c186c3b2c
https://doi.org/10.1117/12.2592566
https://doi.org/10.1117/12.2592566
Publikováno v:
EPJ Web of Conferences, Vol 238, p 06010 (2020)
In this contribution, we emphasize the need for a sophisticated characterization of measurement devices in particular for optical bidirectional measurements. As an example, the ongoing characterization of the UV-microscope at PTB’s linescale compar
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::160a1dd8b8eab87063ec1ee4ff8be56a
https://www.epj-conferences.org/articles/epjconf/pdf/2020/14/epjconf_eosam2020_06010.pdf
https://www.epj-conferences.org/articles/epjconf/pdf/2020/14/epjconf_eosam2020_06010.pdf
Autor:
Jan Krüger, Detlef Bergmann, Matthias Sturm, Wolfgang Häßler-Grohne, Rainer Köning, Bernd Bodermann
Publikováno v:
EPJ Web of Conferences. 266:10009
We report a custom microscope setup whose mechanical and optical components are adjusted by the means of an alignment autocollimator (AAC). Residual centring and angular misalignments of the components towards the microscope’s optical axis are belo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fc6ebb94932b36b533ed1c799a19a320
https://doi.org/10.1051/epjconf/202226610009
https://doi.org/10.1051/epjconf/202226610009
Autor:
Phillip Manley, Jan Krüger, Lin Zschiedrich, Martin Hammerschmidt, Bernd Bodermann, Rainer Köning, Philipp-Immanuel Schneider
Publikováno v:
EPJ Web of Conferences. 266:10010
Dimensional microscopy is an essential tool for non-destructive and fast inspection of manufacturing processes. Standard approaches process only the measured images. By modelling the imaged structure and solving an inverse problem, the uncertainty on
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9d5b0846aaa45407b15bd819f34c018b
https://doi.org/10.1051/epjconf/202226610010
https://doi.org/10.1051/epjconf/202226610010
Publikováno v:
Precision Engineering. 50:114-118
A differential interferometric heterodyne encoder with spatially separated input beams was developed to minimize periodic nonlinearities resulting from polarization mixing. The laser beams with different frequencies were delivered by two polarization
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3e2a3f73a33d27810ef47dd4c0f000ad
https://doi.org/10.1016/j.precisioneng.2017.04.019
https://doi.org/10.1016/j.precisioneng.2017.04.019
Publikováno v:
tm - Technisches Messen. 84:13-21
Zusammenfassung In diesem Beitrag wird ein neues Antriebskonzept des an der PTB für Längenmessungen bis zu 0,55 m betriebenen Vakuumkomparators beschrieben. Dessen Positioniersystem auf Basis eines Direktantriebs wurde um eine sekundäre Steuereinh
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a6bf1af1c2b31c039f741a3e6d5c4ff2
https://doi.org/10.1515/teme-2017-0047
https://doi.org/10.1515/teme-2017-0047
Publikováno v:
Modeling Aspects in Optical Metrology VII.
Optical microscopy is widely used for the characterization of micro- and nanostructures in the field of unidirectional and bidirectional dimensional metrology. Despite the general high recognition in the metrological community, the inherent difficult
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::829a365b3943dc8076465ebd5c9ea77c
https://doi.org/10.1117/12.2527973
https://doi.org/10.1117/12.2527973