Zobrazeno 1 - 10
of 10
pro vyhledávání: '"Rafel Perelló-Roig"'
Publikováno v:
Micromachines, Vol 12, Iss 1, p 82 (2021)
CMOS-MEMS resonators have become a promising solution thanks to their miniaturization and on-chip integration capabilities. However, using a CMOS technology to fabricate microelectromechanical system (MEMS) devices limits the electromechanical perfor
Externí odkaz:
https://doaj.org/article/4dea00972d5f4e0e8a075f93ee1846b9
Publikováno v:
Micromachines, Vol 9, Iss 10, p 484 (2018)
This paper presents the design, fabrication, and electrical characterization of an electrostatically actuated and capacitive sensed 2-MHz plate resonator structure that exhibits a predicted mass sensitivity of ~250 pg·cm−2·Hz−1. The resonator i
Externí odkaz:
https://doaj.org/article/58e72a6441d34ae0bc7e4b84adc3ea47
Publikováno v:
Sensors, Vol 18, Iss 9, p 3124 (2018)
We analyzed experimentally the noise characteristics of fully integrated CMOS-MEMS resonators to determine the overall thermomechanical noise and its impact on the limit of detection at the system level. Measurements from four MEMS resonator geometri
Externí odkaz:
https://doaj.org/article/230f23808e574861ad2a5382e96f0fa8
Autor:
Rafel Perelló-Roig, Jaume Verd, Sebastià Bota, Bartomeu Soberats, Antonio Costa, Jaume Segura
Publikováno v:
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::213492d77b90c285e98d1d44b321fae0
https://doi.org/10.1109/mems49605.2023.10052527
https://doi.org/10.1109/mems49605.2023.10052527
Autor:
Bartomeu Soberats, Jaume Segura, Rafel Perelló-Roig, Antonio Costa, Sebastia Bota, Jaume Verd
Publikováno v:
Lab on a chip. 21(17)
CMOS–MEMS microresonators have become excellent candidates for developing portable chemical VOC sensing systems thanks to their extremely large mass sensitivity, extraordinary miniaturization capabilities, and on-chip integration with CMOS circuitr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::44e9f11f95090d7d916a2ab2a8732b66
https://pubmed.ncbi.nlm.nih.gov/34286805
https://pubmed.ncbi.nlm.nih.gov/34286805
Publikováno v:
Micromachines
Volume 12
Issue 1
Micromachines, Vol 12, Iss 82, p 82 (2021)
Volume 12
Issue 1
Micromachines, Vol 12, Iss 82, p 82 (2021)
CMOS-MEMS resonators have become a promising solution thanks to their miniaturization and on-chip integration capabilities. However, using a CMOS technology to fabricate microelectromechanical system (MEMS) devices limits the electromechanical perfor
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::258748bec3559336af090d4626acc4d3
Publikováno v:
IEEE Access, Vol 12, Pp 75061-75071 (2024)
This article presents a fully differential tunable high-gain transimpedance amplifier (TIA) conceived as a front-end circuit for monolithic CMOS-MEMS resonators operating in self-sustained oscillation mode. The proposed solution is based on a capacit
Externí odkaz:
https://doaj.org/article/9c1a5feefd9344caa14d9744bb050ebb
Publikováno v:
Micromachines
Micromachines, Vol 9, Iss 10, p 484 (2018)
Jaume Verd
Volume 9
Issue 10
Micromachines, Vol 9, Iss 10, p 484 (2018)
Jaume Verd
Volume 9
Issue 10
This paper presents the design, fabrication, and electrical characterization of an electrostatically actuated and capacitive sensed 2-MHz plate resonator structure that exhibits a predicted mass sensitivity of ~250 pg·
cm&minus
2&midd
cm&minus
2&midd
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::73949d2854387318029a7a2c5e4c568c
https://doi.org/10.3390/mi9100484
https://doi.org/10.3390/mi9100484
Publikováno v:
Sensors
Volume 18
Issue 9
Sensors, Vol 18, Iss 9, p 3124 (2018)
Sensors (Basel, Switzerland)
Volume 18
Issue 9
Sensors, Vol 18, Iss 9, p 3124 (2018)
Sensors (Basel, Switzerland)
We analyzed experimentally the noise characteristics of fully integrated CMOS-MEMS resonators to determine the overall thermomechanical noise and its impact on the limit of detection at the system level. Measurements from four MEMS resonator geometri
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::015cbe2611f96d31ab2b7f962f3654bb
Publikováno v:
Sensors, Vol 20, Iss 17, p 4663 (2020)
Based on experimental data, this paper thoroughly investigates the impact of a gas fluid flow on the behavior of a MEMS resonator specifically oriented to gas sensing. It is demonstrated that the gas stream action itself modifies the device resonance
Externí odkaz:
https://doaj.org/article/12f7a9bfa03b4fb3a10fe310297bbbcf