Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Radoslav Rusanov"'
Autor:
Oliver Kraft, Tino Fuchs, Juergen Graf, Roland Mueller-Fiedler, Radoslav Rusanov, Holger Rank
Publikováno v:
Microelectronics Reliability. 55:1920-1925
In this work, failure mechanisms of Pt electrodes including adhesion problems, material migration due to thermally induced compressive stress and electromigration that could occur in the platinum electrodes and heater structures at temperatures above
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9e466ec81ee0d0126dbf2c3dfd90e628
https://doi.org/10.1016/j.microrel.2015.06.106
https://doi.org/10.1016/j.microrel.2015.06.106
Publikováno v:
Microsystem Technologies. 22:481-493
In this work we present a systematic investigation of various failure mechanisms for thin-film platinum heater structures and interdigitated electrodes as components of a resistive type soot particle sensor. We study the role of stress-migration and
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::95f9daa7d15198b2923d567bae602769
https://doi.org/10.1007/s00542-015-2576-6
https://doi.org/10.1007/s00542-015-2576-6
Publikováno v:
2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP).
In this work we present a systematic characterization of the mechanical properties of thin-film silicon carbide electrodes and released structures as components of a μ-contact type combustion pressure sensor. We developed, fabricated and successfull
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f47b413778aa0a38cff2fa577d86f5a6
https://doi.org/10.1109/dtip.2016.7514833
https://doi.org/10.1109/dtip.2016.7514833
Autor:
Radoslav Rusanov, Roland Mueller-Fiedler, Tino Fuchs, Holger Rank, Juergen Graf, Oliver Kraft
Publikováno v:
2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP).
In this work we present a systematic investigation of failure mechanisms for thin-film platinum heater structures and interdigitated electrodes as components of a resistive type soot particle sensor. We study stress-migration and electromigration and
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ad6a32ada03b4c5936be4854a03f41ae
https://doi.org/10.1109/dtip.2014.7056639
https://doi.org/10.1109/dtip.2014.7056639
Autor:
Tino Fuchs, D. Leisen, F. Rohlfing, H. Riesch-Oppermann, C. Eberl, Oliver Kraft, Radoslav Rusanov
Publikováno v:
Review of Scientific Instruments. 86:055104
A novel high-temperature micro-tensile setup allows the characterization of the elastic and plastic as well as creep behavior of free-standing thin films at temperatures of up to 1000 °C. Correspondingly, a new layout for free-standing thin film ten
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::7e333e60af80dfa2a122b25a69a2d7b6
https://doi.org/10.1063/1.4919765
https://doi.org/10.1063/1.4919765