Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Radharamana Mohanty"'
Publikováno v:
ECS Meeting Abstracts. :2315-2315
The fabrication of Silicon membrane by frontend bulk micromachining process has been proven to be one of the simple and cost-effective technique, for fabricating microelectromechanical structures. In this paper, we propose novel geometric mask design
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fd1c190905eb59af32951a81fae030c1
https://doi.org/10.1149/ma2020-01312315mtgabs
https://doi.org/10.1149/ma2020-01312315mtgabs
Publikováno v:
International Journal of Advances in Engineering Sciences and Applied Mathematics. 7:191-197
Front-end bulk micro machining is one of the proven techniques of making suspended microstructures and is highly adapted due to its simple and cost effective way of fabricating the devices. In this paper we propose novel geometric mask designs for ac
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3878be6c7a6239526b50e61a66409510
https://doi.org/10.1007/s12572-015-0145-y
https://doi.org/10.1007/s12572-015-0145-y