Zobrazeno 1 - 10
of 27
pro vyhledávání: '"Racette, Kenneth"'
Autor:
Mizoguchi, Takashi, Akutagawa, Satoshi, Barrett, Monica, Caterer, Michael, Nolan, Robert, Racette, Kenneth, Plouffe, Dennis, Zhou, Nancy
Publikováno v:
Proceedings of SPIE; Nov2009 Part 3, Issue 1, p73791R-73791R-8, 8p
Publikováno v:
Proceedings of SPIE; Nov2006, Issue 1, p628326-628326-7, 7p
Publikováno v:
Proceedings of SPIE; Nov2005 Part 2, Issue 1, p59920L-59920L-10, 10p
Publikováno v:
Proceedings of SPIE; Nov2005, Issue 1, p621-631, 11p
Publikováno v:
Proceedings of SPIE; Nov2005, Issue 1, p516-524, 9p
Autor:
Thiel, Carey, Racette, Kenneth C., Fisch, Emily, Lawliss, Mark, Kindt, Louis, Huang, Chester, Ackel, Robin, Levy, Max
Publikováno v:
Proceedings of SPIE; Nov2003, Issue 1, p339-346, 8p
Publikováno v:
Proceedings of SPIE; Nov2002, Issue 1, p883-892, 10p
Status of fabrication of square-format masks for extreme-ultraviolet lithography (EUVL) at the MCoC.
Autor:
Racette, Kenneth C., Williams, Carey T., Fisch, Emily, Kindt, Louis, Lawliss, Mark, Ackel, Robin, Lercel, Michael J.
Publikováno v:
Proceedings of SPIE; Nov2002, Issue 1, p161-172, 12p
Publikováno v:
Proceedings of SPIE; Nov2002, Issue 1, p865-871, 7p
Autor:
Lercel, Michael J., Fisch, Emily, Racette, Kenneth C., Lawliss, Mark, Williams, Carey T., Kindt, Louis, Huang, Chester
Publikováno v:
Proceedings of SPIE; Nov2002, Issue 1, p18-22, 5p