Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Rabea Schreckenberg"'
Autor:
Peter Awakowicz, Dennis Kirchheim, Moritz Oberberg, Lars Banko, Dario Grochla, Alfred Ludwig, Jan Trieschmann, Thomas Mussenbrock, Stefan Wilski, Christian Hopmann, Guido Grundmeier, Jan Benedikt, Rainer Dahlmann, Rabea Schreckenberg, Ralf Peter Brinkmann, Felix Mitschker, Markus Brochhagen, Teresa de los Arcos, Montgomery Jaritz, Marc Böke
Publikováno v:
Journal of Coatings Technology and Research. 16:573-583
Plasma reactors for the application of silicon oxide coatings (SiOx) are often customized to optimize the processes regarding substrate properties and targeted functionalities. The design of these reactors is often based on qualitative considerations