Zobrazeno 1 - 10
of 25
pro vyhledávání: '"ROBERT S. BLEWER"'
Publikováno v:
Journal of The Electrochemical Society. 140:3588-3590
The authors have used a novel application of in situ high pressure mass spectrometry to monitor the SiH[sub 4] + WF[sub 6] tungsten chemical vapor deposition process. They observed the production of both SiF[sub 4] and SiHF[sub 3] in ratios that vary
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e36bbb434750b6b665e1a2e77161252a
https://doi.org/10.1149/1.2221130
https://doi.org/10.1149/1.2221130
Publikováno v:
SPIE Proceedings.
At sub-half micron design rules and smaller, the (multilevel) metallization required to meet performance and reliability requirements are driving the investigation and development of new materials and processing techniques. Step coverage of films in
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4c33409415ae50cb8033c7fc4b5d11d6
https://doi.org/10.1117/12.145450
https://doi.org/10.1117/12.145450
Publikováno v:
Journal of Nuclear Materials. :313-321
The behavior of deuterium and helium implanted near room temperature at 8 keV into prism plane oriented graphite was studied as a function of implantation fluence and post-anneal temperature. Depth profiles of the implanted species were measured by p
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9691129ef83ceaabc6e2fb7cecf7ef1c
https://doi.org/10.1016/0022-3115(78)90163-0
https://doi.org/10.1016/0022-3115(78)90163-0
Autor:
Robert A. Langley, Robert S. Blewer
Publikováno v:
Nuclear Instruments and Methods. 132:109-117
Measurements of absolute stopping cross sections of erbium and erbium oxide for 250 keV to 2.5 MeV protons and 4 He ions have been made by ion backscattering. Contamination of the erbium films was minimized by in situ deposition of the reactive metal
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::546c1b24de1143887b5a10eef166936c
https://doi.org/10.1016/0029-554x(76)90719-9
https://doi.org/10.1016/0029-554x(76)90719-9
Autor:
Robert S. Blewer
Publikováno v:
Nuclear Instruments and Methods. 149:47-52
The proton backscattering technique has been used to evaluate efforts to achieve tailored depth profiles of implanted impurities in solids. A comprehensive example involving uniform depth profiles of helium implanted into erbium deuteride is presente
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7512c4192ec5ef1f8c30b98bf12b6f1b
https://doi.org/10.1016/0029-554x(78)90836-4
https://doi.org/10.1016/0029-554x(78)90836-4
Autor:
Robert S. Blewer, R.A. Langley
Publikováno v:
Journal of Nuclear Materials. 63:337-346
The depth profiles and retention behavior of 4He implanted at 80 keV into vanadium have been investigated in cold rolled bulk and foil samples. The specimens were implanted at temperatures of 100, 400, and 800° C and at fluences up to 1 × 1018He/cm
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3d007acbc25b9334d88b8a9214079500
https://doi.org/10.1016/0022-3115(76)90348-2
https://doi.org/10.1016/0022-3115(76)90348-2
Autor:
Robert S. Blewer
Publikováno v:
Journal of Nuclear Materials. 53:268-275
Analysis of near-surface helium and hydrogen isotope depth profiles by a specialized proton backscattering technique has been demonstrated as a means to characterize the concentration, initial position, and subsequent migration behavior of all Z atom
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8101fb2e813e12545c7591be44ee3631
https://doi.org/10.1016/0022-3115(74)90255-4
https://doi.org/10.1016/0022-3115(74)90255-4
Dimensional expansion and surface microstructure in helium-implanted erbium and erbium-hydride films
Autor:
J.K. Maurin, Robert S. Blewer
Publikováno v:
Journal of Nuclear Materials. 44:260-278
Topographical, subsurface, and expansion phenomena on helium-implanted erbium and erbium -deuteride films have been investigated vising scanning electron microscopy, double beam interferometry, light optical microscopy, and surface microprofiling tec
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0bdd03105178fc80f5b22c78dd966e77
https://doi.org/10.1016/0022-3115(72)90037-2
https://doi.org/10.1016/0022-3115(72)90037-2
Autor:
Robert S. Blewer
Publikováno v:
Applied Physics Letters. 23:593-595
The depth profiles of helium implanted into copper foils have been observed experimentally by a proton backscattering technique. Carbon and oxygen on the front and rear surfaces of the foils have also been resolved. The mean depth of the helium impla
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::58a3bd448348d134f092c5c6a5228aae
https://doi.org/10.1063/1.1654759
https://doi.org/10.1063/1.1654759
Autor:
Robert S. Blewer
Publikováno v:
Applications of Ion Beams to Metals ISBN: 9781468420814
Proton backscattering at 2.5 MeV has been used to measure the mean depth and profile of implanted helium distributions as a function of implant energy, implant fluence, and post-implant anneal temperature in copper foils of varying thickness. Distrib
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::824289f0ba2f220342a6490edd1504fe
https://doi.org/10.1007/978-1-4684-2079-1_44
https://doi.org/10.1007/978-1-4684-2079-1_44
