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Publikováno v:
IEEE Conference Record - Abstracts. 1999 IEEE International Conference on Plasma Science. 26th IEEE International Conference (Cat. No.99CH36297).
Summary form only given. Thin films of Diamond-Like-Carbon (DLC) are routinely produced by pulsed laser evaporation (PLE) of graphite targets, The optical, electrical, and mechanical properties of such films make them rather attractive for applicatio