Zobrazeno 1 - 10
of 25
pro vyhledávání: '"R.I. Marchenko"'
Publikováno v:
Journal of Micromechanics and Microengineering. 7:1-6
The influence of different types of covering on electron field emission from silicon tips has been studied. For this a series of silicon tip array structures, namely (i) structures with porous silicon layers on the tops of the tips, (ii) tips covered
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::80f7a85baa5e594f1e2c4a2209291be4
https://doi.org/10.1088/0960-1317/7/1/002
https://doi.org/10.1088/0960-1317/7/1/002
Publikováno v:
Scopus-Elsevier
In this investigation we tried to combine the advantages of tips and diamond or diamond-like emitters as low work function jointly with surface asperities play dominant role in the enhancement of emission. The silicon tips with diamond-like carbon (D
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::3a3d5cd6f24e89757d222717059a7bd8
https://doi.org/10.1109/ivmc.1996.601910
https://doi.org/10.1109/ivmc.1996.601910
Autor:
R.I. Marchenko, A.A. Evtukh, V.G. Litovchenko, S.V. Svechnikov, E.G. Manoilov, E.B. Kaganovich
Publikováno v:
IEEE Conference Record - Abstracts. 1997 IEEE International Conference on Plasma Science.
Summary form only given. Commonly the Si tips of electron emitters are manufactured using the wet or dry etching formation routes. The aim of this work is to create Si field emitters without lithography by using new laser technology. Monocrystalline
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::58b4f138a515c380b68fb919d21fdd13
https://doi.org/10.1109/plasma.1997.604379
https://doi.org/10.1109/plasma.1997.604379
Publikováno v:
IEEE Conference Record - Abstracts. 1997 IEEE International Conference on Plasma Science.
Summary form only given. To enhance the field emission of electrons from cathodes, coated by diamond-like carbon (DLC) films the emission properties of DLC-films, deposited on the plane silicon wafers and silicon tip arrays, have been investigated. T
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cc54d6e641ec5737b18a50d80f4b59fa
https://doi.org/10.1109/plasma.1997.605135
https://doi.org/10.1109/plasma.1997.605135
Autor:
A.A. Evtukh, Nickolai I. Klyui, V.G. Popov, V. G. Litovchenko, V.A. Semenovich, R.I. Marchenko
Publikováno v:
Journal de Physique IV Proceedings
Journal de Physique IV Proceedings, EDP Sciences, 1996, 06 (C5), pp.C5-119-C5-124. ⟨10.1051/jp4:1996519⟩
Scopus-Elsevier
Journal de Physique IV Proceedings, EDP Sciences, 1996, 06 (C5), pp.C5-119-C5-124. ⟨10.1051/jp4:1996519⟩
Scopus-Elsevier
Field emission of electrons from silicon tips with porous silicon layers on their surface has been investigated. The silicon tip arrays were formed by wet chemical etching of n-type Si. The wafers with piramidal emitters were then anodized to form on
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::8b6e1af0ab1a0bbea31f8a7d44e2acf1
https://hal.archives-ouvertes.fr/jpa-00254398/file/ajp-jp4199606C519.pdf
https://hal.archives-ouvertes.fr/jpa-00254398/file/ajp-jp4199606C519.pdf
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 17:679
The influence of the diamond-like carbon (DLC) films deposited in different conditions on electron field emission of silicon tips has been investigated. Arrays of square based pyramidal cathodes were fabricated in n-type Si(100) using wet etching in
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::db148251f7b28fbb36277d16772b8dda
https://doi.org/10.1116/1.590617
https://doi.org/10.1116/1.590617
Publikováno v:
Scopus-Elsevier
The electron field emission from silicon tip arrays with layered structures on their surface was investigated. The main task of study were to enhance and stabilize field emission. Among different prepared layered structures were n-Si-SiO/sub 2/, n-Si
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::ecf545089d8956f943eb26bc28850944
https://doi.org/10.1116/1.589334
https://doi.org/10.1116/1.589334
Publikováno v:
Scopus-Elsevier
The use of silicon tip emitters coated with diamond-like carbon (DLC) films allows one to combine the advantages of Si emitters and the unique properties of DLC films. The low electron affinity, chemical and mechanical endurance, and high thermal con
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::29706d98b60b9856c85f041588cf2968
http://www.scopus.com/inward/record.url?eid=2-s2.0-0032307373&partnerID=MN8TOARS
http://www.scopus.com/inward/record.url?eid=2-s2.0-0032307373&partnerID=MN8TOARS
Autor:
S.V. Svechnikov, R.I. Marchenko, E.G. Manoilov, A.A. Evtukh, E.B. Kaganovich, V.G. Litovchenko
Publikováno v:
Scopus-Elsevier
We fabricated Si field emitters without lithography by using new technology. Commonly the Si tips of electron emitters are manufactured using the wet or dry etching formation routes. The aim of this work is to create Si field emitters without lithogr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e7d6062762ea75bacd5c4f206395438b
http://www.scopus.com/inward/record.url?eid=2-s2.0-0031333626&partnerID=MN8TOARS
http://www.scopus.com/inward/record.url?eid=2-s2.0-0031333626&partnerID=MN8TOARS
Publikováno v:
Scopus-Elsevier
In this work, the fact of rather stable enhanced field emission from Si-tip covered by diamond-like carbon (DLC) films is demonstrated. Effect of different types of coatings and surface treatments (electrochemical etching, H+-implantation, Cs-enriche
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a473856e62314b6892531b982c832364
http://www.scopus.com/inward/record.url?eid=2-s2.0-0031550388&partnerID=MN8TOARS
http://www.scopus.com/inward/record.url?eid=2-s2.0-0031550388&partnerID=MN8TOARS