Zobrazeno 1 - 7
of 7
pro vyhledávání: '"R. S. Horwath"'
Autor:
C. B. Zarowin, R. S. Horwath
Publikováno v:
Journal of The Electrochemical Society. 129:2541-2547
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::95d2df88b81ac2863154b2a4727596db
https://doi.org/10.1149/1.2123602
https://doi.org/10.1149/1.2123602
Publikováno v:
Metallized Plastics 1 ISBN: 9781489908810
We have investigated the dependence of internal stress on argon pressure and deposition rate for 0.25 μn copper films sputtered onto a 1-mil (25 μn) — thick polyimide substrate. A dc planar magnetron was used to deposit the copper onto a flexible
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::753a8d1f878b4cb41649af0ebc3c5155
https://doi.org/10.1007/978-1-4899-0879-7_9
https://doi.org/10.1007/978-1-4899-0879-7_9
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 4:698-699
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f176d3112b652ffa33ef4a96031ea8f9
https://doi.org/10.1116/1.573836
https://doi.org/10.1116/1.573836
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 6:66
Parameters which influence the etching of polyimide (PI) downstream of an O2–CF4–Ar microwave (MW) plasma were studied. Of particular importance is the influence of the ratio of atomic number densities O/F in the plasma and the gas flow velocity,
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::96f1b886661256d64ecd9e835befe13e
https://doi.org/10.1116/1.584054
https://doi.org/10.1116/1.584054
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 3:893
Gas phase and surface phenomena responsible for etching polyimide in O2–CF4 rf plasmas have been investigated. The dependence of the etch rate of polyimide on the relative concentrations of these two gases was compared with data from optical emissi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1a77aaf59020a187abe0a9dc4a1a3aa1
https://doi.org/10.1116/1.583078
https://doi.org/10.1116/1.583078
Publikováno v:
Applied Optics. 4:559
Experiments with continuous operation of Nd:CaWO4 lasers at liquid nitrogen and room temperature were reported previously [ L. F. Johnson G. D. Boyd K. Nassau R. R. Soden , Phys. Rev.126, 1406 ( 1962)]. This paper presents the operational characteris
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8a3e4d731045f1820c8988a43324d82e
https://doi.org/10.1364/ao.4.000559
https://doi.org/10.1364/ao.4.000559
Autor:
R. S. Horwath, C. Whiteley
Publikováno v:
Journal of The Electrochemical Society. 110:467
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8bb7984e7cb56150ce517c679ff650fc
https://doi.org/10.1149/1.2425791
https://doi.org/10.1149/1.2425791