Zobrazeno 1 - 10
of 11
pro vyhledávání: '"R. R. Poloczek"'
Autor:
H. L. Fiedler, K. T. Kallis, M. Seiffert, R. R. Poloczek, S. Brabender, M. R. Müller, Peter Glösekötter
Publikováno v:
Quantum Matter. 6:50-53
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::929d7d33f214023d90108e6ef72785c3
https://doi.org/10.1166/qm.2017.1397
https://doi.org/10.1166/qm.2017.1397
Autor:
Hendrik Schuh, Christopher Kontis, R. R. Poloczek, H. L. Fiedler, K. T. Kallis, Andreas Balkenohl
Publikováno v:
Quantum Matter. 3:381-387
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8f832952a74602acd8bf71027ac845e6
https://doi.org/10.1166/qm.2014.1136
https://doi.org/10.1166/qm.2014.1136
Publikováno v:
Journal of Nano Research. 25:49-54
Based on silicon on insulator (SOI) technology [, a monocrystalline membrane is fabricated, in which a buried silicon dioxide layer in the silicon material is the sacrifice layer for the cavity. The membrane is a monocrystalline silicon top layer whi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::dc5f64706fcae9b0973d2651fce40591
https://doi.org/10.4028/www.scientific.net/jnanor.25.49
https://doi.org/10.4028/www.scientific.net/jnanor.25.49
Publikováno v:
Tagungsband.
Zur Realisierung von Drucksensoren ist die Wandlung der druckbedingten mechanischen Verformung einer Membran in ein elektrisches Signal unerlasslich. Im Rahmen des Artikels werden hierfur innovative Moglichkeiten zur monolithischen Integration in Sil
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cfbd8bbd33688bae5d26d3bb849a5ede
https://doi.org/10.5162/sensoren2016/p9.4
https://doi.org/10.5162/sensoren2016/p9.4
Publikováno v:
Journal of Nanoscience and Nanotechnology. 10:6046-6048
The availability of multiple metal layers has become essential for high-density layouts and economic chip size. The presented paper describes an efficient and low-cost alternative to Chemical-Mechanical-Polishing (CMP). The method uses an auxiliary w
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::493232adeda4aeebdb97174e12404bff
https://doi.org/10.1166/jnn.2010.2576
https://doi.org/10.1166/jnn.2010.2576
Publikováno v:
Microelectronic Engineering. 87:1413-1415
This work discusses the potential of process optimization of reactive ion etching processes by the help of desirability. The idea is a model based approach due to the complexity of the chemical and physical operational sequence within the plasma duri
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3eeba7181d9556c075a1be1cb7315839
https://doi.org/10.1016/j.mee.2009.11.153
https://doi.org/10.1016/j.mee.2009.11.153
Publikováno v:
2013 IEEE SENSORS.
Based on silicon on insulator (SOI) technology, a novel absolute pressure sensor with a pseudo-MOSFET read-out is designed and fabricated, in which a buried silicon dioxide layer in the silicon material is the sacrifice layer for the cavity. The memb
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d55c3d772f5b54554eb69d2f26f097f0
https://doi.org/10.1109/icsens.2013.6688458
https://doi.org/10.1109/icsens.2013.6688458
Publikováno v:
2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013).
An experimental research on a novelty method of creating monocrystalline Silicon-membranes by using nanoholes is shown in this paper. A Silicon-on-insulator (SOI) wafer is used as a substrate, whose buried oxide (BOX) demonstrates the sacrificial lay
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6bb988b9211ce2cb16dd0a2bbc35d78e
https://doi.org/10.1109/nano.2013.6720903
https://doi.org/10.1109/nano.2013.6720903
Autor:
Namysłowski G; II Katedra i Klinika Laryngologii Slaskiej AM w Zabrzu., Poloczek R, Pietrawska W, Urban I
Publikováno v:
Otolaryngologia polska = The Polish otolaryngology [Otolaryngol Pol] 1998; Vol. 52 (5), pp. 615-7.
Autor:
Namysłowski G; II Katedra i Klinika Laryngologii Slaskiej AM w Zabrzu., Poloczek R, Pietrawska W, Urbaniec P
Publikováno v:
Otolaryngologia polska = The Polish otolaryngology [Otolaryngol Pol] 1998; Vol. 52 (4), pp. 475-7.