Zobrazeno 1 - 10
of 21
pro vyhledávání: '"R. Puyenbroek"'
Publikováno v:
Microelectronic Engineering. 27:375-379
New silicon-containing polymers have been developed for e-beam and DUV exposure. The products show positive and negative tone images depending on the polarity of the developer solution and a reasonable etch resistance in oxygen RIE plasma. Lithograph
Publikováno v:
Journal of Inorganic and Organometallic Polymers. 4:289-299
Poly(4-t-butoxycarbonyloxystyrene)-g-poly(dimethylsiloxane) and poly(t-butylmethacrylate)-g-poly(dimethylsiloxane) with various chemical compositions were synthesized via free radical polymerization of 4-t-butoxycarbonyloxystyrene (TBCS) or t-butylme
Publikováno v:
Phosphorus Sulfur and Silicon and the Related Elements, 93(1-4), 277-280. GORDON BREACH SCI PUBL LTD
New terpolymers containing phosphazene, epoxy and silicon moieties have been synthesized which were used as negative resists in microlithography. In addition to synthesis and characterization, lithographic properties are discussed.
Autor:
J. C. van De Grampel, A. P. Jekel, R. Puyenbroek, T. J. Arling, M. C. Faber, W. Fransen, A. Meetsma, J. H. Wübbels
Publikováno v:
Phosphorus Sulfur and Silicon and the Related Elements, 76(1-4), 215-218. GORDON BREACH SCI PUBL LTD
Cyclophosphazene-substituted siloxanes and silanes are prepared by the method of hydrosilylation, starting from allylderivatized cyclophosphazenes and hydrosiloxanes or hydrosilanes in the presence of a platinum catalyst. Steric and electronic effect
Autor:
A. P. Jekel, J. C. Van De Grampel, R Puyenbroek, A. Meetsma, T. J. Arling, M. C. Faber, J. H. Wuebbels, W. Fransen
Publikováno v:
ChemInform. 24
Publikováno v:
Journal of Inorganic and Organometallic Polymers. 1:105-114
Phosphazene-substituted polysiloxanes have been synthesized via a hydrosilylation reaction of allyl derivatives of cyclophosphazenes with polymethylhydrosiloxanes. It turned out that a proper choice of both the spacer between the phosphazene group an
Publikováno v:
Polymer, 37(5), 847-854. ELSEVIER SCI LTD
New siloxanes with acid-sensitive substituents have been synthesized by means of hydrosilylation, starting from methylhydrosiloxanes. Details of the preparation and characterization are reported. p -t-Butoxycarbonyloxystyrene, p -t-butoxystyrene and
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::67bb86e87c4f5063ca9a47621375f0e8
https://research.rug.nl/en/publications/6148df08-c2a4-4454-a94f-ad50817238bd
https://research.rug.nl/en/publications/6148df08-c2a4-4454-a94f-ad50817238bd
Autor:
J. C. van de Grampel, R. Puyenbroek, A. Meetsma, B. A. C. Rousseeuw, E. W. J. M. van der Drift
Publikováno v:
ACS Symposium Series ISBN: 9780841233324
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7a839ff2e296966539a1eb5d2254fbb2
https://doi.org/10.1021/bk-1995-0614.ch022
https://doi.org/10.1021/bk-1995-0614.ch022
Publikováno v:
ACS Symposium Series ISBN: 9780841230361
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::12f41fa10e5f66d17cf0ff078de851ec
https://doi.org/10.1021/bk-1994-0572.ch008
https://doi.org/10.1021/bk-1994-0572.ch008
Autor:
A. P. Jekel, Rächel H. J. Hendriks, Erwin G. M. Veldman, Bea M. W. Voss, R Puyenbroek, Johan C. van de Grampel
Publikováno v:
Phosphorus Sulfur and Silicon and the Related Elements, 93(1-4), 363-364. GORDON BREACH SCI PUBL LTD
Polymerization of unsaturated organo-substituted silanes by catalytic hydrosilylation leads to both polymeric and cyclic carbosilanes.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::dd49f841135b116d284c730b1f11093e
https://research.rug.nl/en/publications/1269150f-59ae-4b0d-909a-18e874799d34
https://research.rug.nl/en/publications/1269150f-59ae-4b0d-909a-18e874799d34