Zobrazeno 1 - 2
of 2
pro vyhledávání: '"R. P. Beerkens"'
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 4:794-798
In this paper, the results of an investigation of the Mo–polycide/Al–1% Si interface characteristics are reported. Mo–polycide was produced by sputtering a 0.3 μm MoSi2.2 film on 0.3 μm of phosphorus doped poly‐Si. The composite layer was r
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5546fde9ddb36ee2306c998bcc1781e0
https://doi.org/10.1116/1.573817
https://doi.org/10.1116/1.573817
Publikováno v:
Journal of The Electrochemical Society. 132:2432-2435
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a221844d493ef7c2cb5407f4a224de8d
https://doi.org/10.1149/1.2113594
https://doi.org/10.1149/1.2113594