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pro vyhledávání: '"R. O. Buzhinskii"'
Autor:
V. V. Savranskii, V. G. Ralchenko, A. V. Vlasov, A. A. Isaev, K. I. Zemskov, R. O. Buzhinskii
Publikováno v:
Instruments and Experimental Techniques. 53:301-304
The chemical vapor deposition (CVD) technique is applied for synthesizing diamond films and plates of large size (∼100 mm) and high quality. In the given work, we consider one of the diamond-structure dimensional processing and microprocessing meth