Zobrazeno 1 - 10
of 23
pro vyhledávání: '"R. L. Seliger"'
Autor:
R. L. Seliger, J. W. Ward
Publikováno v:
Journal of Vacuum Science and Technology. 12:1378-1381
The advantages and throughput of a specialized focused‐ion‐beam technique—the creation of smoothly varying lateral doping profiles—are investigated. Calculated and experimental results are presented for the technique by which the log(gain)
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::12a8c896dc2d2085de26ecd7d027cffb
https://doi.org/10.1116/1.568546
https://doi.org/10.1116/1.568546
Autor:
R. L. Seliger, W. P. Fleming
Publikováno v:
Journal of Applied Physics. 45:1416-1422
Microfabrication techniques are being investigated in which a focused high‐energy ion beam bombards a surface to create high‐resolution patterns of implantation doping, damage in crystal structures, or other chemical change such as molecular bond
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::eff5c32f44b39e75177a3c8f7e7a17b1
https://doi.org/10.1063/1.1663422
https://doi.org/10.1063/1.1663422
Autor:
J. W. Ward, R. L. Seliger
Publikováno v:
Journal of Vacuum Science and Technology. 19:1082-1086
In the ion‐extraction region of a liquid‐metal (LM) source, several phenomena occur (e.g., electrostatic‐lens action, axial and transverse space‐charge interactions) that have major effects on the performance of the source. In an effort to be
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bdd4328acc62a0ebd4bca8197022e0f4
https://doi.org/10.1116/1.571173
https://doi.org/10.1116/1.571173
Publikováno v:
Journal of Vacuum Science and Technology. 19:916-920
Focused ion beams from Au–Si, Au–Be, and B–Pt liquid–metal–alloy ion sources have been used to implant GaAs and Si. An Al stopping layer on the wafers was used to trap the Au and Pt ions. Hall mobilities consistent with those in bulk materi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8331e9d8a50135e6f6ff5b9842b3b757
https://doi.org/10.1116/1.571189
https://doi.org/10.1116/1.571189
Publikováno v:
Journal of Vacuum Science and Technology. 19:1158-1163
The use of a focused ion beam for direct implantation of dopants into a semiconductor substrate results in appreciable simplification in the processing of semiconductor devices. We have demonstrated that liquid metal (LM) field‐ionization sources (
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c4fa3a2a77c4476be5380635e5814600
https://doi.org/10.1116/1.571234
https://doi.org/10.1116/1.571234
Publikováno v:
Journal of Vacuum Science and Technology. 16:1897-1900
We report an entirely new pattern‐replication technique for IC fabrication. It has demonstrated submicrometer (
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3dad0b5c7b2c4ab8c01d0e8c5c2a4ea7
https://doi.org/10.1116/1.570323
https://doi.org/10.1116/1.570323
Publikováno v:
Journal of Spacecraft and Rockets. 7:422-428
Causes and magnitudes of thrust misalignment of Kaufman type electron bombardment ion thrustor
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1f327b91f4b696cf0fa3b364577da075
https://doi.org/10.2514/3.29957
https://doi.org/10.2514/3.29957
Publikováno v:
Journal of Spacecraft and Rockets. 3:554-560
Because of the long-time operation (^10,000 hr) required for most space missions, electric propulsion system reliability is a major problem. Since establishment of highcomponent reliability at high confidence levels is both time-consuming and costly,
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f1cb8399a4091d209895921658f1385e
https://doi.org/10.2514/3.28490
https://doi.org/10.2514/3.28490
Autor:
R. L. Seliger
Publikováno v:
Journal of Applied Physics. 43:2352-2357
The equations of motion are developed and solved for ion trajectories inside an E×B type mass separator. Curves are presented which illustrate the focusing of the undeflected ion beam, the trajectories along which ions of different mass species disp
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::69f0dbce1718eb0cc1b11d75a4913c99
https://doi.org/10.1063/1.1661502
https://doi.org/10.1063/1.1661502
Autor:
R. L. Seliger
Publikováno v:
Proceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences. 303:493-496
A model equation for water waves has been suggested by Whitham (1967) to study, qualitatively at least, the different kinds of breaking. This is an integro-differential equation which combines a typical nonlinear convection term with an integral for
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5e1afd150b0a3cf33c0cebf6505366af
https://doi.org/10.1098/rspa.1968.0063
https://doi.org/10.1098/rspa.1968.0063