Zobrazeno 1 - 6
of 6
pro vyhledávání: '"R. L. Rhoades"'
Autor:
S. M. Gorbatkin, R. L. Rhoades
Publikováno v:
Journal of Applied Physics. 80:2605-2613
Optical emission spectroscopy is used to investigate trends with changes in processing parameters for Ar/Cu plasmas in an electron‐cyclotron‐resonance (ECR) plasma deposition system. The primary motivation for this work is to monitor trends in io
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::648fe062d32a4fe9a43e0dbcc274f757
https://doi.org/10.1063/1.363177
https://doi.org/10.1063/1.363177
Publikováno v:
Thin Solid Films. 253:382-385
An electron cyclotron resonance (ECR) plasma has been used in conjunction with a solid metal sputter target for Cu deposition over 200-mm diameters. The goal is to develop a deposition process suitable for filling submicron, high aspect ratio feature
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4ebe9d2b74b565db254f33453154cae9
https://doi.org/10.1016/0040-6090(94)90352-2
https://doi.org/10.1016/0040-6090(94)90352-2
Publikováno v:
Applied Physics Letters. 65:2672-2674
Hard boron suboxide thin films were deposited in an electron cyclotron resonance (ECR) microwave plasma system at substrate temperatures below 300 °C. A high‐temperature effusion cell, operated at 2200°–2250 °C, was used for injection of boron
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d67533527d2a28fa502886c3aa6a4389
https://doi.org/10.1063/1.112598
https://doi.org/10.1063/1.112598
Autor:
S. M. Gorbatkin, R. L. Rhoades
Publikováno v:
Applied Physics Letters. 65:2004-2006
Optical emission from neutrals and ions of several noble gases has been profiled in an electron cyclotron resonance plasma system. In argon plasmas with a net microwave power of 750 W, the neutral (696.5‐nm) and ion (488‐nm) emission profiles are
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8cdb8f857cc4f711574b3a949203b8b3
https://doi.org/10.1063/1.112844
https://doi.org/10.1063/1.112844
Autor:
J. T. Verdeyen, R. L. Rhoades
Publikováno v:
Applied Physics Letters. 60:2951-2953
The first known instance of electron beam pumped lasing on the 546.1 nm transition in mercury (Hg) is reported. This has been achieved using high‐energy electrons to create excitation and ionization in a coaxial diode chamber containing a mixture o
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9ff206c745ccfe9971086df6b52ec8e4
https://doi.org/10.1063/1.106825
https://doi.org/10.1063/1.106825
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 14:1853
A permanent magnet electron cyclotron resonance microwave plasma source has been coupled to a copper sputter target to produce ionized copper fluxes for submicron integrated circuit metallization. A custom launcher assembly allows the use of microwav
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a3ae9dbc397e01f84daf643f0ec9047d
https://doi.org/10.1116/1.588566
https://doi.org/10.1116/1.588566