Zobrazeno 1 - 10
of 83
pro vyhledávání: '"R. L. Champion"'
Publikováno v:
Applied Surface Science. 253:3789-3798
Surface ions generated by electron stimulated desorption from mass spectrometer ion source grids are frequently observed, but often misidentified. For example, in the case of mass 19, the source is often assumed to be surface fluorine, but since the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8eb873834ef5c3904a9177f542a39b5c
https://doi.org/10.1016/j.apsusc.2006.07.093
https://doi.org/10.1016/j.apsusc.2006.07.093
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 22:2056-2060
Typically, the mass spectral peak observed at 19 amu in residual gas analyzers at very high vacuum (VHV) and ultrahigh vacuum (UHV) has been attributed to fluorine. Using Fourier transform mass spectrometry (FTMS), the presence of the hydronium ion H
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9d6bf723a0065ebf39e18150b9d1ca6f
https://doi.org/10.1116/1.1784827
https://doi.org/10.1116/1.1784827
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 21:1796-1799
This brief report presents mass spectral resolution of H3O+ and F+ at mass 19 in a high vacuum system. Typically, this mass spectral peak observed in residual gas analyzers has always been attributed to fluorine. Using Fourier transform mass spectrom
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::059165fc8a2c271112155966f8004beb
https://doi.org/10.1116/1.1590965
https://doi.org/10.1116/1.1590965
Publikováno v:
Surface Science. 538:211-218
The absolute secondary electron and anion emission probabilities for low energy ( − , N 2 + , Ar + , Ne + and He + impacting an oxygen-adsorbed Mg(0 0 0 1) single crystal surface have been measured as a function of oxygen exposure and of incident i
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6cb82df471647f8f23fdef945dad025c
https://doi.org/10.1016/s0039-6028(03)00740-4
https://doi.org/10.1016/s0039-6028(03)00740-4
Publikováno v:
Journal of Applied Physics. 92:1657-1662
Trifluoromethane (CHF3) is used in semiconductor plasma processing chambers to achieve high-etch selectivity of an oxide layer over a silicon substrate. Such surface etching is governed by the ion and molecule fluxes near the surface, the concentrati
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1e3bfb8e85c15de8976b95aa4d90b935
https://doi.org/10.1063/1.1491276
https://doi.org/10.1063/1.1491276
Autor:
W.S. Vogan, R. L. Champion
Publikováno v:
Surface Science. 492:83-90
Secondary anion and electron yields resulting from low-energy (50–500 eV) Na + bombardment of an oxygen-adsorbed Si(1 0 0) substrate have been measured as a function of oxygen exposure and of Na + impact energy. Adsorbate coverage ranges from none
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::afac31893afe2f3fe8f3920553ddf1c6
https://doi.org/10.1016/s0039-6028(01)01380-2
https://doi.org/10.1016/s0039-6028(01)01380-2
Publikováno v:
The Journal of Chemical Physics. 115:1765-1768
Insulating gas mixtures containing SF6 have been promoted to serve as replacements for pure SF6 in order to reduce SF6 atmospheric emission. It has been argued that some synergism may be achieved by choosing proper buffer gases in mixtures with SF6 s
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2a9192c449f78d4b2440e11bacd5259e
https://doi.org/10.1063/1.1380692
https://doi.org/10.1063/1.1380692
Publikováno v:
Surface Science. 459:14-22
Absolute probabilities for generating secondary electrons and negative ions have been measured as a function of adsorbate coverage and impact energy for 50–500 eV Na + incident upon a tungsten surface. Adsorbate coverage ranges from none up to a mo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8515dfc218a74bcda961a434e783df11
https://doi.org/10.1016/s0039-6028(00)00486-6
https://doi.org/10.1016/s0039-6028(00)00486-6
Publikováno v:
Physical Review E. 60:7449-7456
Absolute cross sections have been measured for reactants typically found in carbon tetrafluoride (CF(4)) discharges for collision energies below a few hundred electron volts. The reactions investigated include collision-induced dissociation and disso
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::44871e06827ac1118898eeda91e9233a
https://doi.org/10.1103/physreve.60.7449
https://doi.org/10.1103/physreve.60.7449
Publikováno v:
Journal of Applied Physics. 85:1832-1837
Absolute yields of electrons and negative ions resulting from positive ions impacting stainless steel have been determined as a function of impact energy for clean and oxygen-covered surfaces. Photoelectron emission has been used to monitor the effec
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5c430289449b5ceaf68bfb1a16f399be
https://doi.org/10.1063/1.369330
https://doi.org/10.1063/1.369330