Zobrazeno 1 - 1
of 1
pro vyhledávání: '"R. H. Ibbotson"'
Publikováno v:
Microelectronic Engineering. 85:1314-1317
We present the fabrication of a polyimide microcantilever array with integrated gold piezoresistive strain gauges and a thick SU-8 backing for use as a surface stress sensor. The selected polyimide's low Young's modulus (1.8GPa) theoretically results
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f7668cc9f332f882c1543602d66d19d7
https://doi.org/10.1016/j.mee.2007.12.065
https://doi.org/10.1016/j.mee.2007.12.065
