Zobrazeno 1 - 10
of 15
pro vyhledávání: '"R. E. Klinger"'
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 10:3401-3406
MetaModeTM reactive sputtering was employed to produce optical quality aluminum oxide films at rates an order of magnitude higher than those possible with conventional reactive magnetron sputtering. System pressure, reactive‐to‐nonreactive gas fl
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b9527cf69c260d4b99afd9386d97410f
https://doi.org/10.1116/1.577791
https://doi.org/10.1116/1.577791
Publikováno v:
World Environmental and Water Resources Congress 2009.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::805f48fd8a754f7c313d3305c43adf0b
https://doi.org/10.1061/41036(342)367
https://doi.org/10.1061/41036(342)367
Publikováno v:
Journal of Vacuum Science and Technology. 14:219-222
Lead oxide films with an average thickness of 50 μm were deposited onto water‐cooled, polished aluminum substrates by reactive ion plating. Pure lead was evaporated into an rf discharge sustained by either pure O2 or an Ar+O2 mixture. All films we
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b38b23315097a860fcc3ad107362994a
https://doi.org/10.1116/1.569125
https://doi.org/10.1116/1.569125
Publikováno v:
Chemical Physics Letters. 62:46-50
Auger and X-ray photoelectron spectroscopies have been used to investigate preferential sputtering effects in stabilized cubic 8 mole ??? Y 2 O 3 -doped ZrO 2 films. The results show that oxygen is preferentially removed by Ar + ion bombardment while
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::597fea944e68e44d25a485355f8db68c
https://doi.org/10.1016/0009-2614(79)80410-8
https://doi.org/10.1016/0009-2614(79)80410-8
Publikováno v:
Journal of Vacuum Science and Technology. 14:177-180
The deposition rate, chemistry, microstructure, and optical and electrical characteristics of rf sputter deposited Y2O3‐doped ZrO2 films have been investigated as a function of applied substrate bias VS. Some preliminary results on Y2O3‐doped CeO
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::348bee4257623b73dd6217f9bd4d91a9
https://doi.org/10.1116/1.569116
https://doi.org/10.1116/1.569116
Autor:
J. E. Greene, R. E. Klinger
Publikováno v:
Journal of Applied Physics. 54:1595-1604
The reactive ion etching of (100) GaAs in pure CCl2F2 and CF4 discharges, as well as in mixtures of Ar and CCl4, CCl2F2, or CF4, has been investigated. Anisotropic etching with removal rates R of up to 800 nm/min have been obtained in reactive discha
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1272a5c8d0f4dae0b10ab2e9a18bfa45
https://doi.org/10.1063/1.332143
https://doi.org/10.1063/1.332143
Autor:
R. E. Klinger, J. E. Greene
Publikováno v:
Applied Physics Letters. 38:620-622
The reactive ion etching of (100) GaAs in CCl2F2 and mixed CCl2F2+Ar discharges has been investigated. Anisotropic etching with removal rates R of 0.8 mm/min have been obtained in pure CCl2F2 discharges operated at 5.3 Pa (40 mTorr) and −3 kV, wher
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3385c07e2ac08bc3b4d6854207025231
https://doi.org/10.1063/1.92455
https://doi.org/10.1063/1.92455
Publikováno v:
Applied Physics Letters. 36:930-932
Polycrystalline Si films with average grain sizes of ∼8 μm have been grown by laser‐induced chemical vapor deposition from SiCl4. A cw CO2 laser operated at 10.6 μm was used to provide local heating of quartz substrates in an otherwise cool rea
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::328aa6fc41a29646fca4e211b6232b08
https://doi.org/10.1063/1.91377
https://doi.org/10.1063/1.91377
Autor:
P. Swab, R. E. Klinger
Publikováno v:
MRS Proceedings. 115
Ultramicrotomy is a technique for cutting cross-sections of material which was originally used by biologists for soft tissue analysis. With only a few changes to accommodate the hard dielectric coatings and substrates, the technique may be used to pr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::627db50e53f82e3fe57acc3adc2e286f
https://doi.org/10.1557/proc-115-229
https://doi.org/10.1557/proc-115-229
Autor:
P. Swab, R. E. Klinger
Publikováno v:
Annual Meeting Optical Society of America.
Thin cross sections of titania-silica and zirconia-silica quarterwave stacks were prepared by ultramicrotomy and examined by transmission electron microscopy. Ultramicrotomy is a standard biological sample preparation technique originally developed f
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::edef4e8458a7c8846d548b4c0b19a06d
https://doi.org/10.1364/oam.1985.thv1
https://doi.org/10.1364/oam.1985.thv1