Zobrazeno 1 - 2
of 2
pro vyhledávání: '"R. D. Olney"'
Publikováno v:
Journal of Vacuum Science and Technology. 16:1897-1900
We report an entirely new pattern‐replication technique for IC fabrication. It has demonstrated submicrometer (
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3dad0b5c7b2c4ab8c01d0e8c5c2a4ea7
https://doi.org/10.1116/1.570323
https://doi.org/10.1116/1.570323
Publikováno v:
Journal of Vacuum Science and Technology. 16:1610-1612
Ion beams have increased usefulness for high‐resolution microstructure fabrication if they are patterned to small dimensions before they strike a target. First, results are presented of maskless micromachining, doping, and resist exposure with a sc
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::74fccccb4f867a34ce10e6101b2cc4e7
https://doi.org/10.1116/1.570253
https://doi.org/10.1116/1.570253