Výsledky vyhledávání - "R. D. Barlow"

An analytic form for the SIMS response function measured from ultra-thin impurity layers

Autor: R. D. Barlow, Mark Dowsett, G. Rowlands, P. N. Allen

Publikováno v: Surface and Interface Analysis. 21:310-315

We present an analytic form for the response function measured in a SIMS depth profile of an impurity layer less than 1 nm wide (a delta layer). Although the process used to evolve the function can be justified on physical grounds, we make no claim t

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::b6d483597a068f3edaab1829b3c975c6
https://doi.org/10.1002/sia.740210508

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SIMS response functions for MBE grown delta layers in silicon

Autor: Mark Dowsett, H. S. Fox, R. D. Barlow, S.M. Newstead, R. A. Kubiak

Publikováno v: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 72:442-446

SIMS response functions and depth resolution parameters have been measured using O 2 + primary ions at normal incidence and 45°, for a range of silicon MBE grown epilayers containing ultrathin buried layers or “deltas” doped with B. Growth and d

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::67af0009e62ddcaa57afb11b9aca1078
https://doi.org/10.1016/0168-583x(92)95140-m

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Elemental boron and antimony doping of MBE Si and SiGe structures grown at temperatures below 600°C

Autor: David Bowen, Evan H. C. Parker, E. Başaran, A.R. Powell, T. Naylor, J. C. Brighten, N. L. Mattey, D. W. Smith, Terry E. Whall, R. D. Barlow, S.M. Newstead, M.G. Dowsett, C. J. Emeleus, C. P. Parry, R. A. Kubiak

Publikováno v: Journal of Crystal Growth. 111:907-911

This paper considers the low temperature doping of (100) Si and SiGe structures with elemental B and Sb sources particularly with regard to obtaining very narrow delta doping spikes. B is found to be an excellent dopant at SiGe growth temperatures in

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::172ff25ce43f221caec12e9c3917a655
https://doi.org/10.1016/0022-0248(91)91105-j

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