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Publikováno v:
The European Physical Journal D. 63:431-440
Equilibrating gravitation by electric forces, microparticles can be confined in the plasma sheath above suitably biased local electrodes. Their position depends on the detailed structure of the plasma sheath and on the charge that the particles acqui
Autor:
Matthias Wolter, R. Basner, H. R. Maurer, Viktor Schneider, Thomas Trottenberg, Holger Kersten
Publikováno v:
Contributions to Plasma Physics. 51:218-227
An interesting aspect in the research of complex (dusty) plasmas is the experimental study of the interaction of microparticles with the surrounding plasma for diagnostic purposes. Local electric fields can be determined from the behavior of particle
Publikováno v:
Contributions to Plasma Physics. 50:954-961
The temperature of micro-particles, confined in the sheath of a capacitively coupled low-pressure rf-discharge in front of an Adaptive Electrode, has been measured for different plasma conditions and in different gas mixtures by using temperature-dep
Publikováno v:
The European Physical Journal D. 54:219-224
Dust particles often appear in industrial plasmas as undesirable product of the plasma-wall interactions. Large particles of several micrometers in diameter are concentrated in a thin layer (the sheath) above the lower electrode of the rf driven para
Publikováno v:
Faraday Discuss.. 137:157-171
An interesting aspect in the research of complex (dusty) plasmas is the experimental study of the interaction of nano- and micro-particles with the surrounding plasma for diagnostic purpose. From the behaviour of the particles, local electric fields
Publikováno v:
Plasma Sources Science and Technology. 15:507-516
The formation of the electron distribution function (EDF) in the bulk plasma of a capacitively coupled radio-frequency (rf) discharge in argon generated in the plasma-chemical reactor PULVA-INP is investigated experimentally and theoretically. Measur
Publikováno v:
International Journal of Mass Spectrometry. 214:365-374
We measured absolute partial and total cross sections for the electron ionization of hexafluoroethane (C 2 F 6 ) from threshold to 900 eV using a time-of-flight mass spectrometer (TOF-MS), which can be operated in a linear and in a reflection mode. M
Publikováno v:
International Journal of Mass Spectrometry. 208:1-5
Titanium tetrachloride (TiCl 4 ) is used for the plasma-assisted chemical vapor deposition of titanium nitride films. We studied the electron impact ionization of TiCl x ( x = 1 – 3) free radicals, which are abundant constitutents in TiCl 4 -contai