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pro vyhledávání: '"R. Ba¨ttig"'
Autor:
B. Valk, R. Ba¨ttig, O. Anthamatten, P. Vogel, N. F. de Rooij, M.-A. Gre´tillat, Cornel Marxer
Publikováno v:
Sensors and Actuators A: Physical. 61:449-454
The REMO (REflective MOdulator) component is a micromechanical light modulator fabricated by polysilicon surface micromachining. During operation the maximum tensile stress is 130 MPa and the maximum homogeneous electric field is 60 V μm −1 . The
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::713b5d6a740d49d202e0e05852849c5a
https://doi.org/10.1016/s0924-4247(97)80304-4
https://doi.org/10.1016/s0924-4247(97)80304-4
