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pro vyhledávání: '"R. B. Khamankar"'
Publikováno v:
Journal of Applied Physics. 88:5351-5359
A molecular physics-based complementary model, which includes both field and current, is introduced to help resolve the E versus 1/E-model controversy that has existed for many years as to the true physics behind time-dependent dielectric breakdown (
Publikováno v:
Microelectronics Reliability. 40:1591-1597
A molecular physics-based complementary model, which includes both field and current, is introduced to help resolve the E versus 1/E TDDB model controversy that has existed for many years It is shown here that either TDDB model can be valid for certa
Autor:
R B Khamankar, J W McPherson
Publikováno v:
Semiconductor Science and Technology. 15:462-470
SiO2 films, at constant electric field, show a significant reduction in time-dependent dielectric breakdown (TDDB) performance when the thickness tox is scaled below 4.0 nm. This reduction in TDDB performance is coincident with and scales with the in