Zobrazeno 1 - 10
of 46
pro vyhledávání: '"R. B. Irwin"'
Autor:
R. B. Irwin, F. Hillion, B.B. Rossie, T. L. Shofner, R. H. Mills, Fred A. Stevie, M. J. Antonell, S. R. Brown, B. M. Purcell, Catherine Vartuli, Lucille A. Giannuzzi
Publikováno v:
Surface and Interface Analysis. 31:345-351
Commercially available focused ion beam (FIB) workstations with spatial resolution of 5–7 nm can prepare specimens with excellent lateral resolution. This capability has been utilized extensively by the semiconductor industry to obtain materials ch
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2221d3113f96e783648862828134044e
https://doi.org/10.1002/sia.1063
https://doi.org/10.1002/sia.1063
Autor:
R. B. Irwin, C. C. Yeh, Catherine Vartuli, J. S. Huang, King-Ning Tu, J. L. Drown, T. L. Shofner, Chih Chen
Publikováno v:
Journal of Materials Research. 15:2387-2392
Stability of submicron contacts under high current density has been an outstanding reliability issue in advanced Si devices. Polarity effect of failure was observed in Ni and Ni2Si contacts on n+-Si and p+-Si. In this report, we studied the failure d
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5bbed30dcebc12fa45df7553b52d4426
https://doi.org/10.1557/jmr.2000.0343
https://doi.org/10.1557/jmr.2000.0343
Autor:
Fred A. Stevie, R. B. Irwin, T. L. Shofner, B. I. Prenitzer, S. R. Brown, K. Newman, Lucille A. Giannuzzi
Publikováno v:
Metallurgical and Materials Transactions A. 29:2399-2406
Particles of Zn powder have been studied to show that high-quality scanning electron microscope (SEM) and transmission electron microscope (TEM) specimens can be rapidly produced from a site-specific region on a chosen particle by the focused ion bea
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::06e872428712060267c19103c96fed16
https://doi.org/10.1007/s11661-998-0116-z
https://doi.org/10.1007/s11661-998-0116-z
Publikováno v:
Physica Status Solidi (a). 147:477-490
In this study, dc magnetron sputtered WSi x films are characterized with RBS, SIMS, and TEM techniques. The films are deposited in a Varian 3180 sputtering system with the conmag WSi target 91-1209-05. Contaminations emitting from the shutter and cav
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6bae3743bf5ce97d9ceec998a2d55f3a
https://doi.org/10.1002/pssa.2211470218
https://doi.org/10.1002/pssa.2211470218
Publikováno v:
Journal of medical microbiology. 61(Pt 11)
We present a case of aortic and tricuspid native valve endocarditis in which Cardiobacterium valvarum was isolated from the blood culture of a 65-year-old man. Cardiobacterium valvarum is a fastidious, Gram-negative bacillus. The genus Cardiobacteriu
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::2c534c6e6ea4d7743f874b1384a48985
https://pubmed.ncbi.nlm.nih.gov/22878249
https://pubmed.ncbi.nlm.nih.gov/22878249
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 12:2415-2419
The elements Ru, Rh, Pr, Eu, Tm, Lu, Re, Os, and Ir have been successfully implanted into Si, and, in some cases, GaAs, in order to quantify secondary ion mass spectrometry (SIMS). SIMS relative sensitivity factors have been determined for these elem
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::53f31f37347495f9bcebe92de715cf4e
https://doi.org/10.1116/1.579224
https://doi.org/10.1116/1.579224
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 47:29-32
Silicon has been ion implanted with arsenic to form shallow junctions. As the size of microelectronic devices becomes smaller, the role of the implanted tail distribution becomes important. Tail profiles have been produced by an anodic oxidation and
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7bf1e96106e65f4230d0fa12440aa61a
https://doi.org/10.1016/0168-583x(90)90043-t
https://doi.org/10.1016/0168-583x(90)90043-t
Publikováno v:
American journal of orthopedics (Belle Mead, N.J.). 30(7)
We retrospectively reviewed the results of 71 consecutive patients managed with coralline hydroxyapatite (Pro-Osteon 500; Interpore Cross International) for bone defects produced as a result of surgical extirpation of bone tumors. All patients underw
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=pmid________::25103cac28ed96ed3640f9cd43f73674
https://pubmed.ncbi.nlm.nih.gov/11482509
https://pubmed.ncbi.nlm.nih.gov/11482509
Publikováno v:
Microscopy research and technique. 41(4)
A site-specific technique for cross-section transmission electron microscopy specimen preparation of difficult materials is presented. A focused ion beam was used to slice an electron transparent membrane from a specific area of interest within a bul
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=pmid________::0435f7430bb244756ac7b9aa295dcc6f
https://pubmed.ncbi.nlm.nih.gov/9633946
https://pubmed.ncbi.nlm.nih.gov/9633946
Publikováno v:
The 1998 international conference on characterization and metrology for ULSI technology.
Localized plan view TEM samples have been prepared from silicon semiconductor wafers using the focused ion beam lift-out technique. Two different methods of sample preparation before FIB machining were found to be successful: mounting cleaved samples
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3d40658532c3ab8ee1ecc6e53f49344d
https://doi.org/10.1063/1.56881
https://doi.org/10.1063/1.56881