Zobrazeno 1 - 10
of 30
pro vyhledávání: '"R P Brinkmann"'
Publikováno v:
Plasma Sources Science and Technology. 32:044007
Phenomena taking place in capacitively coupled plasmas with large electrodes and driven at very high frequencies are studied numerically utilizing a novel energy- and charge-conserving implicit fully electromagnetic particle-in-cell (PIC)/Monte Carlo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::6147f00928ac94c8bff855a110ae80ab
https://doi.org/10.1088/1361-6595/accecb
https://doi.org/10.1088/1361-6595/accecb
Autor:
B Berger, D Eremin, M Oberberg, D Engel, C Wölfel, Q-Z Zhang, P Awakowicz, J Lunze, R P Brinkmann, J Schulze
Publikováno v:
Plasma Sources Science and Technology. 32:045009
In magnetized capacitively coupled radio-frequency (RF) discharges operated at low pressure the influence of the magnetic flux density on discharge properties has been studied recently both by experimental investigations and in simulations. It was fo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c06e41da89fcda6ec8e73f5d662390a9
https://doi.org/10.1088/1361-6595/acc480
https://doi.org/10.1088/1361-6595/acc480
Autor:
D Eremin, B Berger, D Engel, J Kallähn, K Köhn, D Krüger, L Xu, M Oberberg, C Wölfel, J Lunze, P Awakowicz, J Schulze, R P Brinkmann
Publikováno v:
Plasma Sources Science and Technology. 32:045008
The present work investigates electron transport and heating mechanisms using an (r, z) particle-in-cell simulation of a typical rf-driven axisymmetric magnetron discharge with a conducting target. Due to a strong geometric asymmetry and a blocking c
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::f431d5df187198326398714bdde5f6d2
https://doi.org/10.1088/1361-6595/acc47f
https://doi.org/10.1088/1361-6595/acc47f
Autor:
D. Engel, D. Eremin, M. Oberberg, B. Berger, C. Woelfel, J. Lunze, P. Awakowicz, J. Schulze, R. P. Brinkmann
Publikováno v:
2020 IEEE International Conference on Plasma Science (ICOPS).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7858c34e7c68c439f8376e83aeb4813e
https://doi.org/10.1109/icops37625.2020.9717847
https://doi.org/10.1109/icops37625.2020.9717847
Autor:
D. Eremin, B. Berger, D. Engel, M. Oberberg, C. Woelfel, J. Lunze, P. Awakowicz, J. Schulze, R. P. Brinkmann
Publikováno v:
2020 IEEE International Conference on Plasma Science (ICOPS).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7e5e2a2c3758f8cd78d29f2189f280d3
https://doi.org/10.1109/icops37625.2020.9717869
https://doi.org/10.1109/icops37625.2020.9717869
Publikováno v:
2020 IEEE International Conference on Plasma Science (ICOPS).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ca5532dbdb714c9414c8e09effacca18
https://doi.org/10.1109/icops37625.2020.9717682
https://doi.org/10.1109/icops37625.2020.9717682
Publikováno v:
Lecture Notes in Computational Science and Engineering ISBN: 9783540657309
A one-dimensional, self-consistent hybrid plasma model is presented which describes both electro-positive and electro-negative radio frequency (RF) discharges within a unified formalism. The model allows for the simultaneous application of inductive
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f2cb47c3ff031c4ee0e4443883cfa844
https://doi.org/10.1007/978-3-642-60155-2_34
https://doi.org/10.1007/978-3-642-60155-2_34
Autor:
M Vural, R P Brinkmann
Publikováno v:
Journal of Physics D: Applied Physics; Jan2007, Vol. 40 Issue 2, p510-519, 10p
Akademický článek
Tento výsledek nelze pro nepřihlášené uživatele zobrazit.
K zobrazení výsledku je třeba se přihlásit.
K zobrazení výsledku je třeba se přihlásit.
Conference
Tento výsledek nelze pro nepřihlášené uživatele zobrazit.
K zobrazení výsledku je třeba se přihlásit.
K zobrazení výsledku je třeba se přihlásit.