Zobrazeno 1 - 10
of 30
pro vyhledávání: '"R K, Lowry"'
Publikováno v:
Journal of Non-Crystalline Solids. :835-839
We use electron spin resonance and current density versus electric field measurements to link silicon dangling bond defects, called E′ centers, to leakage currents in thin films of SiO2 on silicon.
Publikováno v:
IEEE Transactions on Nuclear Science. 46:1534-1543
We evaluate the hole trapping response of twenty-two oxides subjected to twenty-two different sets of processing parameters. The oxides were prepared in three different facilities, the Harris Semiconductor-Intersil Palm Bay facility, the former Naval
Autor:
David A. DeCrosta, Patrick M. Lenahan, B. Czagas, C. Gamlen, C. Frye, H. L. Evans, R. K. Lowry, Robert T. Fuller, M. Morrison
Publikováno v:
IEEE Transactions on Nuclear Science. 43:2565-2571
A study has been conducted of the effects of deposition conditions on the radiation hardness of borophosphosilicate glass (BPSG). Films deposited by two common deposition techniques were evaluated using gamma cell testing, electron spin resonance (ES
Publikováno v:
Journal of Applied Physics. 76:2872-2880
Using electron‐spin resonance (ESR), we demonstrate that several E’ variant precursors exist in a variety of technologically significant thermally grown thin SiO2 films on Si. The E’ variants include two varieties with the ubiquitous Eγ’ lin
Autor:
David J. Hydes, A. J. Pomroy, H. Edmunds, R. K. Lowry, Roger Proctor, T. J. Moffat, I. R. Joint, K. R. Dyer, John Eric Jones, Duncan A. Purdie, M. J. Howarth, W. Van Leussen
Publikováno v:
Philosophical Transactions of the Royal Society of London. Series A: Physical and Engineering Sciences. 343:383-403
Seasonal variations dominate many processes in continental shelf seas. A comprehensive coherent inter-disciplinary data set for one seasonal cycle was obtained by repeating the same cruise track in the southern North Sea at monthly intervals from Aug
Autor:
R. K. Lowry, R. C. Kullberg
Publikováno v:
SPIE Proceedings.
The primary cause of corrosion, stiction or other failure mechanisms within hermetically sealed enclosures has historically been viewed as due to increases in internal moisture concentrations. It has historically been postulated that the primary sour
Publikováno v:
Journal of Applied Physics. 76:8186-8188
Using electron spin resonance (ESR), a new electrically active point defect in thermally grown SiO2 films on Si has been detected. The defect has a large capture cross section for electrons when it is paramagnetic and holes when it is diamagnetic (ES
Publikováno v:
Applied Physics Letters. 65:2281-2283
We demonstrate that at least two varieties of E’ defect precursors exist in a wide variety of conventionally processed thermal SiO2 thin films. We provisionally label the defects EP and E’γp. We find that EP defect capture cross sections exceed
Autor:
A.Y. Kang, R. Weimer, R. K. Lowry, J. P. Campbell, D. Woodbury, Patrick M. Lenahan, S.T. Liu, J.J. Mele
Publikováno v:
2001 IEEE International Reliability Physics Symposium Proceedings. 39th Annual (Cat. No.00CH37167).
Stress induced leakage current is an important and quite possibly fundamental physically limiting problem in the scaling of metal-oxide-silicon integrated circuitry. We present evidence linking specific atomic scale defects to leakage currents in the