Zobrazeno 1 - 10
of 77
pro vyhledávání: '"Quan-Zhi Zhang"'
Publikováno v:
AIP Advances, Vol 13, Iss 8, Pp 085327-085327-15 (2023)
The combined influence of airflows and a parallel magnetic field on an AC-driven dielectric barrier discharge plasma is experimentally investigated through image analyses, electrical measurements, and optical diagnoses. After applying a parallel magn
Externí odkaz:
https://doaj.org/article/ba59855b6e0741579b4563bc8372c7d6
Publikováno v:
IEEE Transactions on Plasma Science. 49:3392-3397
It is recognized that in very-high-frequency capacitively coupled plasma (VHF CCP) reactors, the standing wave effects can be enhanced by the presence of nonlinear higher harmonics self-excited by the plasma series resonance (PSR). In this work, we i
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::49fac294ab2959763cc24c288ec44f9e
https://doi.org/10.1109/tps.2021.3120596
https://doi.org/10.1109/tps.2021.3120596
Publikováno v:
Journal of Physics D: Applied Physics. 56:285203
The surface charging effect of positive ions at the trench bottom during the etching of dielectric materials has become a severe problem with the shrinkage of electronic feature dimensions. Pulsed plasmas have been widely used to overcome surface cha
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4975d687f93c299b5c7d96b98eee5523
https://doi.org/10.1088/1361-6463/acc8e5
https://doi.org/10.1088/1361-6463/acc8e5
Publikováno v:
Plasma Chemistry and Plasma Processing. 40:1163-1187
We studied hydrogen sulfide (H2S) decomposition into hydrogen (H2) and sulfur (S2) in a gliding arc plasmatron (GAP) and microwave (MW) plasma by a combination of 0D and 2D models. The conversion, energy efficiency, and plasma distribution are examin
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ac3cb527e883b9766b5a7bd47d330073
https://doi.org/10.1007/s11090-020-10100-3
https://doi.org/10.1007/s11090-020-10100-3
Publikováno v:
Journal of Applied Physics. 133:043301
The pulsed inductively coupled plasma (ICP) has considerable potential to satisfy multiple stringent scaling requirements for use in the semiconductor industry. However, overshoot of plasma parameters during the rising period of the pulse affects the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::de962c963354e665808f02c0d216ca79
https://doi.org/10.1063/5.0130054
https://doi.org/10.1063/5.0130054
Publikováno v:
Journal of Electrostatics. 120:103771
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ecca413e81c441190e93c8df2b09f7ce
https://doi.org/10.1016/j.elstat.2022.103771
https://doi.org/10.1016/j.elstat.2022.103771
Publikováno v:
Journal of Applied Physics. 132:153301
The surface charge distribution in a surface dielectric barrier discharge driven by repetitive pulse bias superimposed on AC voltage is measured using the Pockels effect of an electro-optic crystal. The impact of surface charge on surface-breakdown c
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bef9d780fd10b1c1fff3df5ef2d67bdd
https://doi.org/10.1063/5.0102975
https://doi.org/10.1063/5.0102975
Publikováno v:
Plasma Sources Science and Technology. 31:085012
Based on particle-in-cell and test-particle simulations, an α- to γ-mode transition of the electron power absorption dynamics is found to be induced as a function of an externally applied transverse magnetic field in low pressure capacitively coupl
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7a47d4b3e61dc8256b2491aea8d07671
https://doi.org/10.1088/1361-6595/ac882d
https://doi.org/10.1088/1361-6595/ac882d
Publikováno v:
Chinese Physics B. 31:085202
Two classic radio-frequency (RF) plasmas, i.e., the capacitively and the inductively coupled plasmas (CCP and ICP), are widely employed in material processing, e.g., etching and thin film deposition, etc. Since RF plasmas are usually operated in part
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::aa4623dcaace5aecee938db9a248c58a
https://doi.org/10.1088/1674-1056/ac7551
https://doi.org/10.1088/1674-1056/ac7551
Publikováno v:
Plasma Sources Science and Technology. 31:07LT01
An enhanced electron heating mechanism based on a resonance between the cyclotron motion of electrons and radio frequency (rf) electric field in the plasma bulk is reported in weakly magnetized capacitively coupled argon plasmas at low pressure. When
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::979d64cf7f8cfaedc33e4f16f84be96e
https://doi.org/10.1088/1361-6595/ac7903
https://doi.org/10.1088/1361-6595/ac7903