Zobrazeno 1 - 1
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pro vyhledávání: '"Qing Rui Liang"'
Autor:
Huanhuan Wang, Chao Gao, Michael Dudley, Yan Min Zong, Xi Jie Wang, Yu Qiang Gao, Sheng Song, Jian Song, Hong Yan Zhang, Qing Rui Liang, Min Ning
Publikováno v:
Materials Science Forum. :51-55
High-quality 100 mm 4H-SiC boules were grown using the physical vapor transport (PVT) method with optimized growth parameters. Micro-Raman spectroscopy measurement shows that the 4H-SiC polytype of the entire wafer is uniform. The micropipe density i