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pro vyhledávání: '"Qikai Xie"'
Publikováno v:
Computer-Aided Design and Applications. 14:815-822
This paper presents a MEMS mirror actuated by four suspended electro-thermal bimorphs. The dimension of the mirror platform is 250 µm × 250 µm. The MEMS mirror design is created based on process modeling following strict fabrication constraints. T
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::ce26f0717d4b2d35577a143e6677f808
https://doi.org/10.1080/16864360.2017.1287756
https://doi.org/10.1080/16864360.2017.1287756
Autor:
Qikai Xie, Xiaolin Chen
Publikováno v:
Volume 10: Micro- and Nano-Systems Engineering and Packaging.
Optical disk drives (ODD) have become one of the most popular solutions for large storage capacity applications and are widely used in consumer electronics. For precise positioning in optical disk drives (ODD), the actuating system using MEMS technol
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b9e8fe0156aaa1b4ad7a1ca94162ba46
https://doi.org/10.1115/imece2013-65375
https://doi.org/10.1115/imece2013-65375