Zobrazeno 1 - 10
of 13
pro vyhledávání: '"Qi-Liang Ni"'
Publikováno v:
2020 China Semiconductor Technology International Conference (CSTIC).
An innovative model of the mechanism for peeling defect in inter metal dielectric(IMD) process induced by poor adhesion between metal and oxide film on wafer bevel is presented. Peeling defect is inspected by dark field inspection (DFI) tool of KLA.
Publikováno v:
ACTA PHOTONICA SINICA. 49:725001
Autor:
Bo Chen, Ke-Fei Song, Zhao-Hui Li, Qing-Wen Wu, Qi-Liang Ni, Xiao-Dong Wang, Jin-Jiang Xie, Shi-Jie Liu, Ling-Ping He, Fei He, Xiao-Guang Wang, Bin Chen, Hong-Ji Zhang, Hai-Feng Wang, Xin Zheng, Shu-Lin E, Yong-Cheng Wang, Tao Yu, Liang Sun, Jin-Ling Wang, Zhi Wang, Liang Yang, Qing-Long Hu, Ke Qiao, Zhong-Su Wang, Xian-Wei Yang, Hai-Ming Bao, Wen-Guang Liu, Zhe Li, Ya Chen, Yang Gao, Hui Sun, Wen-Chang Chen
Publikováno v:
Research in Astronomy and Astrophysics. 14:1654-1663
The process of development and calibration for the first Moon-based extreme ultraviolet (EUV) camera to observe Earth's plasmasphere is introduced and the design, test and calibration results are presented. The EUV camera is composed of a multilayer
Publikováno v:
Guang pu xue yu guang pu fen xi = Guang pu. 35(12)
Based-MCP position-sensitive anode photon-counting imaging detector is good at detecting extremely faint light, which includes micro-channel plate (MCP), position-sensitive anode and readout, and the performances of these detectors are mainly decided
Publikováno v:
Guang pu xue yu guang pu fen xi = Guang pu. 30(8)
Photon counting detectors based on microchannel plate have widespread applications in astronomy. The present paper deeply studies secondary electron of microchannel plate in extreme ultraviolet. A theoretical model describing extreme ultraviolet-exci
Publikováno v:
SPIE Proceedings.
Extreme Ultraviolet Telescope (EUT) will image solar corona in four EUV narrow bandpasses defined by multilayered coatings deposited on normal incidence optics. In order to make sure it will get sub-arcsecond angular resolution in the mission we have
Autor:
Qi-Liang, Ni, Bo, Chen
Publikováno v:
Guang pu xue yu guang pu fen xi = Guang pu. 28(11)
A laser-produced plasma (LPP) source with liquid aerosol spray target and nanosecond laser was developed, based on both soft X-ray radiation metrology and extreme ultraviolet projection lithography (EUVL). The LPP source is composed of a stainless st
Publikováno v:
Guang pu xue yu guang pu fen xi = Guang pu. 25(3)
The soft X-ray and vacuum ultraviolet sources developed in CIOMP are presented. The wall-stabilized argon arc source with spectrum stability and repeatability of +/-0.3% is applied to the calibration of spectrum intensity distribution of the vacuum u
Publikováno v:
Guang pu xue yu guang pu fen xi = Guang pu. 25(3)
A soft X-ray reflectometor with laser-produced plasma source developed in the authorial lab is presented for the measurements of efficiencies of gratings, transmission of filter and reflectance of multilayer coatings. The reflectometer is composed of
Publikováno v:
Guang pu xue yu guang pu fen xi = Guang pu. 24(1)
This paper presents a method to detect and measure spectrum intensity from a laser plasma soft X-ray source. A Channel Electron Multiplier (CEM) and a calibrated silicon photodiode were used as detectors in this method, the former is a nonstandard de