Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Qi Jing Lin"'
Publikováno v:
Applied Mechanics and Materials. 870:114-119
In this paper, nanosteps were fabricated by a new method. This method used the energy of focus imaging of focused ion beam to peel the material surface for fabricating the nanosteps. By changing the number of focus imaging can get different deepness
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4c05335c3d8244010328a59f783f3355
https://doi.org/10.4028/www.scientific.net/amm.870.114
https://doi.org/10.4028/www.scientific.net/amm.870.114
Publikováno v:
Advanced Materials Research. :842-846
The accuracy and traceability of measurement at nano-scale are directly related to nano-fabrication. Nanostep is typical structure, so the measurement and characterization of nanosteps are important to improve the accuracy of nano-fabrication. This p
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3322e83a5c7480d0ad09b805a54949f5
https://doi.org/10.4028/www.scientific.net/amr.655-657.842
https://doi.org/10.4028/www.scientific.net/amr.655-657.842