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pro vyhledávání: '"Q. C. Dao"'
Autor:
Shuyao Zhou, Q. C. Dao, Biswajit Mukhopadhyay, Piotr Mackowiak, Oswin Ehrmann, Klaus-Dieter Lang, Michael Woratz, Peter Herrmann, T. Weiland, Olaf Pohl, Volker Noack, Ha-Duong Ngo
Publikováno v:
Sensors & Transducers, Vol 207, Iss 12, Pp 30-35 (2016)
In this paper we present high reliable and accurate silicon-based trace humidity sensors for use in aerospace and process industry. The sensors have been realized by using simple MEMS technology in this work. One is a single sensor (sensor cell) for
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::d8a84e3c3bb5e3f8ba4fea2e75d83346
https://publica.fraunhofer.de/handle/publica/254254
https://publica.fraunhofer.de/handle/publica/254254