Effect of Wet Treatment on Stability of Spin-On Dielectrics for STI Gap-Filling in Nanoscale Memory

Autor: Kim, Gyu Hyun, Park, Soon Young, Pyo, Seung Seok, Han, Ji Hye, Kim, Jung Nam, Oh, Kee Joon, Ryu, Choon Kun, Choi, Yong Soo, Kwak, Noh Jung, Park, Sung Ki

Publikováno v: Diffusion and Defect Data Part B: Solid State Phenomena; January 2009, Vol. 145 Issue: 1 p193-196, 4p