Comparisons between membrane, bridge and cantilever miniaturized resistive vacuum gauges.

Autor: Punchihewa KG; Department of Electrical and Computer Engineering, University of Illinois at Chicago, Chicago, IL 60607, USA. kpunch2@uic.edu, Zaker E, Kuljic R, Banerjee K, Dankovic T, Feinerman A, Busta H

Publikováno v: Sensors (Basel, Switzerland) [Sensors (Basel)] 2012; Vol. 12 (7), pp. 8770-81. Date of Electronic Publication: 2012 Jun 27.