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Autor:
Pu-Jia Shan, Shang Wang, Jun-Jie Shen, D. L. Hou, Guoke Li, Rui-Bin Zhao, Congmian Zhen, Yan Liu
Publikováno v:
Thin Solid Films. 589:22-26
Iron nitride films, including single phase films of α -FeN (expanded bcc Fe), γ′ -Fe 4 N, e -Fe 3 − x N (0 ≤ x ≤ 1), and γ″ -FeN, were sputtered onto AlN buffered glass substrates. It was found possible to control the phases in the films