Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Pu Lei Yang"'
Autor:
Wei Yuan Wang, Hong Yu Liang, Ying Liu, Yu Hong Dong, Wen Hui Yuan, Pu Lei Yang, Qing Nan Zhao
Publikováno v:
Advanced Materials Research. :247-251
P-type hydrogenated amorphous silicon films were deposited on float glass substrates by plasma enhanced chemical vapor deposition (PECVD). The effect of B doping concentration on the properties of the films was studied. The structure of the films was
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::40928bd8cc0930fd56ba510af44144cf
https://doi.org/10.4028/www.scientific.net/amr.239-242.247
https://doi.org/10.4028/www.scientific.net/amr.239-242.247
Publikováno v:
Advanced Materials Research. :1428-1432
Hydrogenated amorphous silicon (a-Si:H) films were deposited on glass substrates with silane (SiH4) gas and hydrogen using RF-PECVD method at different power. The phase structure of the films was measured with Raman spectrometer and Panalytical X'Per
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ae7af3e6f7c3c8e590244141ce566846
https://doi.org/10.4028/www.scientific.net/amr.239-242.1428
https://doi.org/10.4028/www.scientific.net/amr.239-242.1428
Publikováno v:
Advanced Materials Research. :2334-2339
The textured thin films of Aluminum-doped zinc oxide (AZO), prepared on glass substrates by magnetron sputtering, were treated under the environment of hydrogen plasma in plasma enhanced chemical vapor deposition (PECVD) chamber for different time. T
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::876918c6c9c1c8424f4c2db47e6ec95e
https://doi.org/10.4028/www.scientific.net/amr.194-196.2334
https://doi.org/10.4028/www.scientific.net/amr.194-196.2334