Zobrazeno 1 - 10
of 99
pro vyhledávání: '"Probst, Jürgen"'
Autor:
Braig, Christoph1 (AUTHOR) braig@iap-adlershof.de, Probst, Jürgen2 (AUTHOR), Löchel, Heike2 (AUTHOR), Pina, Ladislav3 (AUTHOR), Krist, Thomas2 (AUTHOR), Seifert, Christian1 (AUTHOR)
Publikováno v:
Journal of Synchrotron Radiation. Jul2024, Vol. 31 Issue 4, p690-697. 8p.
Autor:
Hönicke, Philipp, Andrle, Anna, Kayser, Yves, Nikolaev, Konstantin V., Probst, Jürgen, Scholze, Frank, Soltwisch, Victor, Weimann, Thomas, Beckhoff, Burkhard
The increasing importance of well-controlled ordered nanostructures on surfaces represents a challenge for existing metrology techniques. To develop such nanostructures and monitor complex processing constraints fabrication, both a dimensional recons
Externí odkaz:
http://arxiv.org/abs/2005.02078
Periodic nanostructures are fundamental elements in optical instrumentation as well as basis structures in integrated electronic circuits. Decreasing sizes and increasing complexity of nanostructures have made roughness a limiting parameter to the pe
Externí odkaz:
http://arxiv.org/abs/1907.05307
Autor:
Pflüger, Mika, Soltwisch, Victor, Xavier, Jolly, Probst, Jürgen, Scholze, Frank, Becker, Christiane, Krumrey, Michael
Publikováno v:
J. Appl. Cryst. 52, 322-331. (2019)
In this study, grazing incidence small-angle X-ray scattering (GISAXS) is used to collect statistical information on dimensional parameters in an area of 20 mm x 15 mm on photonic structures produced by nanoimprint lithography. The photonic structure
Externí odkaz:
http://arxiv.org/abs/1903.08101
Akademický článek
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Autor:
Soltwisch, Victor, Hönicke, Philipp, Kayser, Yves, Eilbracht, Janis, Probst, Jürgen, Scholze, Frank, Beckhoff, Burckhard
Publikováno v:
Nanoscale, 2018,10, 6177-6185
The geometry of a Si$_3$N$_4$ lamellar grating was investigated experimentally with reference-free grazing-incidence X-ray fluorescence analysis. While simple layered systems are usually treated with the matrix formalism to determine the X-ray standi
Externí odkaz:
http://arxiv.org/abs/1801.04157
Autor:
Soltwisch, Victor, Herrero, Analia Fernandez, Pflüger, Mika, Haase, Anton, Probst, Jürgen, Laubis, Christian, Krumrey, Michael, Scholze, Frank
Laterally periodic nanostructures were investigated with grazing incidence small angle X-ray scattering (GISAXS) by using the diffraction patterns to reconstruct the surface shape. To model visible light scattering, rigorous calculations of the near
Externí odkaz:
http://arxiv.org/abs/1704.08032
Publikováno v:
IUCrJ Vol 4, Part 4 (2017)
GISAXS is often used as a versatile tool for the contactless and destruction-free investigation of nanostructured surfaces. However, due to the shallow incidence angles, the footprint of the X-ray beam is significantly elongated, limiting GISAXS to s
Externí odkaz:
http://arxiv.org/abs/1703.01146
Akademický článek
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Exotic manipulation of the flow of photons in nanoengineered semiconductor materials with an aperiodic distribution of nanostructures plays a key role in efficiency-enhanced and industrially viable broadband photonic technologies. Through a generic d
Externí odkaz:
http://arxiv.org/abs/1605.06107