Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Preston A. Crupe"'
Autor:
Takuya Kuroda, HyoungKook Kim, Hsin-Hui Huang, Shannon Dunn, Jasper P. Munson, Russell A. Black, Victor A. Perez, Christopher R. Carr, Preston A. Crupe
Publikováno v:
SPIE Proceedings.
The Global 450mm Consortium (G450C), which is located at the SUNY Poly campus in Albany, NY was created to develop and evaluate a manufacturing tool set for 450mm wafers. The Lithography cell at G450C consists of a Nikon NSR-S650D 193nm immersion sca
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e36e369c36ed04dc19500a2d35f02266
https://doi.org/10.1117/12.2257633
https://doi.org/10.1117/12.2257633
Autor:
Christopher R. Carr, Victor A. Perez, Takuya Kuroda, HyoungKook Kim, Russell A. Black, Hsin-Hui Huang, Shannon Dunn, Preston A. Crupe, Jasper P. Munson
Publikováno v:
SPIE Proceedings.
The Global 450mm Consortium (G450C) has completed its 5th year of developing and evaluating manufacturing 450mm tool sets. This paper focuses on how the lithography cell resolution performance has progressed from tool acceptance to current day. Initi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f334514fd682c83fa4631b840bfa417b
https://doi.org/10.1117/12.2257642
https://doi.org/10.1117/12.2257642