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pro vyhledávání: '"Prathima Kapa"'
Autor:
Prathima Kapa, Hai-Feng Ji, K. Varahramyan, Ji Fang, Liu Pan, Wes Davis, Arogydeepika Bandhanadham
Publikováno v:
Sensors and Actuators B: Chemical. 134:390-395
Two types of aluminum oxide (Al 2 O 3 ) modified microcantilevers (MCLs) were tested for their sensitivity and reproducibility for detection of low levels of moisture. Aluminum was sputtered on the MCLs and oxidized to Al 2 O 3 through thermal oxidat
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fbcdb28f72f66d1f49e2fd0be871830c
https://doi.org/10.1016/j.snb.2008.05.014
https://doi.org/10.1016/j.snb.2008.05.014
