Zobrazeno 1 - 10
of 43
pro vyhledávání: '"Pradelles, Jonathan"'
Autor:
Robinson, John C., Sendelbach, Matthew J., Pradelles, Jonathan, Perraud, Loïc, Sezestre, Elie, Fay, Aurélien, Schuch, Nivea, Figueiro, Thiago, Robert, Frédéric
Publikováno v:
Proceedings of SPIE; April 2023, Vol. 12496 Issue: 1 p124960U-124960U-13, 12371054p
Autor:
Robinson, John C., Sendelbach, Matthew J., Moly, Alexandre, Schuch, Nivea, Robert, Frederic, Figueiro, Thiago, Bustos, Jessy, Perraud, Loïc, Pradelles, Jonathan, Sezestre, Elie
Publikováno v:
Proceedings of SPIE; April 2023, Vol. 12496 Issue: 1 p124961D-124961D-14, 12371154p
Autor:
Robinson, John C., Sendelbach, Matthew J., Bourguignon, Thibaut, Le Gratiet, Bertrand, Pradelles, Jonathan, Bérard-Bergery, Sébastien, Valade, Charles, Schuch, Nivea, Possémé, Nicolas
Publikováno v:
Proceedings of SPIE; April 2023, Vol. 12496 Issue: 1 p124960J-124960J-11, 12371052p
Autor:
Abaidi, Mohamed, Belissard, Jordan, Schuch, Nivea, Figueiro, Thiago, Millequant, Matthieu, Pradelles, Jonathan, Perraud, Loïc, Fay, Aurélien, Bustos, Jessy, Henry, Jean-Baptiste, Guyez, Estelle, Berard-Bergery, Sébastien, Schiavone, Patrick
Publikováno v:
Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV
SPIE Advanced Lithography
SPIE Advanced Lithography, Feb 2021, Online Only, France. pp.36, ⟨10.1117/12.2584040⟩
SPIE Advanced Lithography
SPIE Advanced Lithography, Feb 2021, Online Only, France. pp.36, ⟨10.1117/12.2584040⟩
In the effort of continuing improving patterning strategies for increasing circuit density while reducing dimensions, several challenges regarding patterning fidelity emerge. In recent years, stochastic effects had their relative importance increased
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::ec1e4341d1621986febe0f2bdcdc87f2
https://hal.science/hal-03156540
https://hal.science/hal-03156540
Autor:
Behringer, Uwe, Bourguignon, Thibaut, Le Gratiet, Bertrand, Pradelles, Jonathan, Bérard-Bergery, Sébastien, Rademaker, Guido, Possémé, Nicolas
Publikováno v:
Proceedings of SPIE; November 2022, Vol. 12472 Issue: 1 p124720C-124720C-9, 1122490p
Autor:
Behringer, Uwe, Soltani, Elvire, Le-Gratiet, Bertrand, Bérard-Bergery, Sébastien, Pradelles, Jonathan, Desmoulins, Simon, Sicurani, Emmanuel, Tiron, Raluca
Publikováno v:
Proceedings of SPIE; November 2022, Vol. 12472 Issue: 1 p124720I-124720I-9, 1122490p
Autor:
Robinson, John C., Sendelbach, Matthew J., Sezestre, Élie, Scoarnec, Juline, Pradelles, Jonathan, Perraud, Loïc, Fay, Aurélien, Bérard-Bergery, Sébastien, Bustos, Jessy, Henry, Jean-Baptiste, Dubreuil, Olivier, Mendes, Ivanie, Valade, Charles, Moly, Alexandre, Batte, Alice, Schuch, Nivea, Robert, Frederic, Figueiro, Thiago
Publikováno v:
Proceedings of SPIE; May 2022, Vol. 12053 Issue: 1 p120531G-120531G-16, 11932586p
Autor:
Robinson, John C., Sendelbach, Matthew J., Bourguignon, Thibaut, Bouyssou, Régis, Pradelles, Jonathan, Bérard-Bergery, Sébastien, Le-Gratiet, Bertrand, Bange, Romain, Schuch, Nivea, Figueiro, Thiago, Possémé, Nicolas
Publikováno v:
Proceedings of SPIE; May 2022, Vol. 12053 Issue: 1 p120530C-120530C-13, 11932484p
Autor:
Soltani, Elvire, Le-Gratiet, Bertrand, Bérard-Bergery, Sébastien, Pradelles, Jonathan, Bourguignon, Thibaut, Le Pennec, Aurélie, Charras, Nathalie, Tiron, Raluca
Publikováno v:
Proceedings of SPIE; 2/9/2024, Vol. 12802, p1280209-1280209, 1p
Autor:
Rademaker, Guido, Blancquaert, Yoann, Labbaye, Thibault, Mourier, Lucie, Figueiro, Nivea, Sanchez, Francisco, Koret, Roy, Pradelles, Jonathan, Landis, Stéfan, Rey, Stéphane, Haupt, Ronny, Bringoltz, Barak, Shifrin, Michael, Kandel, Daniel, Ger, Avron, Sendelbach, Matthew, Wolfling, Shay, Pain, Laurent
Publikováno v:
Proceedings of SPIE; 7/22/2018, Vol. 10775, p1-7, 7p