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Autor:
M. Stettler, Colin D. Landon, Cory E. Weber, Prabakar Marepalli, Daniel Pantuso, Lei Jiang, Patrick H. Keys, Sayed Hasan, Stephen M. Cea
Publikováno v:
IEEE Transactions on Electron Devices. 68:5350-5357
The objective of this work is to briefly illustrate the breadth of problems industrial technology computer aided design (TCAD) departments are expected to address when supporting modern semiconductor process development, focusing on two important tre