Angular and energy distributions of ions emitted from a GaIn liquid alloy ion source.

Autor: Medvedev, V. K., Chernyi, V. I., Popovich, N. N.

Publikováno v: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1993, Vol. 11 Issue 2, p523-526, 4p