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Autor:
Belde, Peter, Durand, Catherine, Jank, Michael, Maillet, Jean-Christophe, Moclair, Fiona, Morelli, Atillio, Pook, Beatrix, Prodanov, Dimiter, Roquet, Pascal
Nanoelectronics relies on multiple semiconductor processes resulting in pattering of macroscopic objects (silicon wafers) at nanoscale level. The International Technology Roadmap for Semiconductors of semiconductor industry pursues increasing resolut
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::4d1901a0e4f78862730373e394df5c6a
https://doi.org/10.5281/zenodo.804436
https://doi.org/10.5281/zenodo.804436
