Zobrazeno 1 - 10
of 155
pro vyhledávání: '"Polymer mems"'
Publikováno v:
Micromachines, Vol 14, Iss 5, p 944 (2023)
This work reports the design, modelling, and simulation of a novel polymer MEMS gas sensor platform called a ring–flexure–membrane (RFM) suspended gate field effect transistor (SGFET). The sensor consists of a suspended polymer (SU-8) MEMS based
Externí odkaz:
https://doaj.org/article/49849940b74947cca07c4a002aec344e
Akademický článek
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Autor:
Miaomiao Zhang
Publikováno v:
CONVERTER. :50-58
In order to improve the quality and precision of ultrasonic precision sealing of polymer MEMS device, micro energy director array was proposed on the sealing surface of polymer MEMS device, the influence of the distribution size of micro energy direc
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bbe284e88e07e1e577200dc8410083e7
https://doi.org/10.17762/converter.35
https://doi.org/10.17762/converter.35
Publikováno v:
Micromachines, Vol 3, Iss 1, Pp 137-149 (2012)
Flexible and high-sensitive capacitive sensors are demanded to detect pressure distribution and/or tactile information on a curved surface, hence, wide varieties of polymer-based flexible MEMS sensors have been developed. High-sensitivity may be achi
Externí odkaz:
https://doaj.org/article/034b1d10542443e69366af71322761c6
Publikováno v:
Micromachines, Vol 9, Iss 5, p 197 (2018)
Polymer Micro ElectroMechanical Systems (MEMS) have the potential to constitute a powerful alternative to silicon-based MEMS devices for sensing applications. Although the use of commercial photoresists as structural material in polymer MEMS has been
Externí odkaz:
https://doaj.org/article/6df773e25d59462f82c8e14b646af206
Akademický článek
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Autor:
Robert Bogue
Publikováno v:
Sensor Review. 36:225-230
Purpose This paper aims to provide details of MEMS (micro-electromechanical system) sensors produced from materials other than silicon. Design/methodology/approach Following a short introduction, this first considers reasons for using alternatives to
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::47c9de7c6b64f9cf21f138f975e43b2c
https://doi.org/10.1108/sr-03-2016-0057
https://doi.org/10.1108/sr-03-2016-0057
Akademický článek
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Publikováno v:
Applied Mechanics and Materials. 607:133-138
Based on the theoretical study in our previous work, a novel thermal assisted ultrasonic bonding method for polymer Micro/nanoElectro-Mechanical Systems (M/NEMS) has been demonstrated. Bonding experiments of PMMA microfluidic chips with micro-channel
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::21e9588ff56ea23f87ad8f33fed84c03
https://doi.org/10.4028/www.scientific.net/amm.607.133
https://doi.org/10.4028/www.scientific.net/amm.607.133
Autor:
Ajay Giri Prakash Kottapalli, Siyu Tian, Jianmin Miao, Mohsen Asadnia, Zhiyuan Shen, Michael S. Triantafyllou, Kai Tao
Publikováno v:
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS).
This paper reports the application of a polymer MEMS flow sensor in sensing critical flows associated with intravenous infusions. Infusion pumps that are used to deliver drugs intravenously currently have no means of accurately sensing the velocity o
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bae1089242f92436ea88810dad17a194
https://doi.org/10.1109/memsys.2017.7863487
https://doi.org/10.1109/memsys.2017.7863487