Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Po-Yueh Tsai"'
Autor:
Chin-Yi Yang, Ying-Lang Wang, Chin-Sheng Lu, Chen-Ting Lin, Chin-Chang Huang, Chih-Mu Huang, Po-Yueh Tsai, Yao-Wen Wu
Publikováno v:
2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
This paper describes a new paradigm of defect sampling, the Defect Intelligent Sampling System (Defect-ISS), which introduces a far more effective in-line defect inspection and process control method in a diverse product and technology node mass prod
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::536605421e575a377eba4922f48d2ffc
https://doi.org/10.1109/asmc.2010.5551440
https://doi.org/10.1109/asmc.2010.5551440
Publikováno v:
SPIE Proceedings.
Since the semiconductor manufacturing process has become more and more complicated due to the introduction of either new materials or new structures, detecting the source of a defect has become dramatically difficult. Automatic Defect Classification
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ea1f54ab9480876d0525b50d6ef738ea
https://doi.org/10.1117/12.712069
https://doi.org/10.1117/12.712069
Autor:
Chen-Ting Lin, Chin-Chang Huang, Chin-Yi Yang, Yao-Wen Wu, Chin-Sheng Lu, Po-Yueh Tsai, Chih-Mu Huang, Ying-Lang Wang
Publikováno v:
Advanced Semiconductor Manufacturing Conference (ASMC), 2010 IEEE/SEMI; 2010, p162-164, 3p