Converting molecular layer deposited alucone films into Al 2 O 3 /alucone hybrid multilayers by plasma densification.

Autor: Santo Domingo Peñaranda J; Department of Solid State Sciences, CoCooN research group, Ghent University, Krijgslaan 281, S1, 9000 Gent, Belgium. juan.santodomingopenaranda@ugent.be., Nisula M; Department of Solid State Sciences, CoCooN research group, Ghent University, Krijgslaan 281, S1, 9000 Gent, Belgium. juan.santodomingopenaranda@ugent.be., Vandenbroucke SST; Department of Solid State Sciences, CoCooN research group, Ghent University, Krijgslaan 281, S1, 9000 Gent, Belgium. juan.santodomingopenaranda@ugent.be and IMEC, Kapeldreef 75, B-3001 Leuven, Belgium., Minjauw MM; Department of Solid State Sciences, CoCooN research group, Ghent University, Krijgslaan 281, S1, 9000 Gent, Belgium. juan.santodomingopenaranda@ugent.be., Li J; Department of Solid State Sciences, CoCooN research group, Ghent University, Krijgslaan 281, S1, 9000 Gent, Belgium. juan.santodomingopenaranda@ugent.be., Werbrouck A; Department of Solid State Sciences, CoCooN research group, Ghent University, Krijgslaan 281, S1, 9000 Gent, Belgium. juan.santodomingopenaranda@ugent.be., Keukelier J; Department of Solid State Sciences, CoCooN research group, Ghent University, Krijgslaan 281, S1, 9000 Gent, Belgium. juan.santodomingopenaranda@ugent.be and IMEC, Kapeldreef 75, B-3001 Leuven, Belgium., Pitillas Martínez AI; Department of Solid State Sciences, CoCooN research group, Ghent University, Krijgslaan 281, S1, 9000 Gent, Belgium. juan.santodomingopenaranda@ugent.be and IMEC, Kapeldreef 75, B-3001 Leuven, Belgium and M2S, Centre for Surface Chemistry and Catalysis, University of Leuven, Celestijnenlaan 200F, B-3001 Leuven, Belgium., Dendooven J; Department of Solid State Sciences, CoCooN research group, Ghent University, Krijgslaan 281, S1, 9000 Gent, Belgium. juan.santodomingopenaranda@ugent.be., Detavernier C; Department of Solid State Sciences, CoCooN research group, Ghent University, Krijgslaan 281, S1, 9000 Gent, Belgium. juan.santodomingopenaranda@ugent.be.

Publikováno v: Dalton transactions (Cambridge, England : 2003) [Dalton Trans] 2021 Feb 02; Vol. 50 (4), pp. 1224-1232.