Zobrazeno 1 - 8
of 8
pro vyhledávání: '"Pirmin Hermann Otto Rombach"'
Autor:
Wolfgang Benecke, Markus Kehlenbeck, Ole Hansen, Walter Lang, Jörn Koblitz, Thomas Knieling, Pirmin Hermann Otto Rombach, Christian Wang, Yanxin Zhuang
Publikováno v:
Journal of Micromechanics and Microengineering. 16:2259-2264
Six different source chemicals (organosilanes) were successfully used for deposition of self-assembled monolayers (SAMs) onto silicon substrates by a vapor phase process. Five different fluorocarbon coatings and one hydrocarbon coating were deposited
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f36ffae8ed3e5b1e4cb723d61f4b742e
https://doi.org/10.1088/0960-1317/16/11/002
https://doi.org/10.1088/0960-1317/16/11/002
Autor:
Matthias Heschel, Jens Anders Branebjerg, Pirmin Hermann Otto Rombach, A. Hoogerwerf, K. Rasmussen, Siebe Bouwstra, M. Amskov Gravad, Jakob Janting, U. Klein, Matthias Müllenborn, Jochen Friedrich Kuhmann
Publikováno v:
Sensors and Actuators A: Physical. 92:23-29
The first results of silicon microphones that are completely batch-packaged and integrated with signal conditioning circuitry in a chip stack are discussed. The chip stack is designed to be directly mounted into a system, such as a hearing instrument
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::803a7fc3a15ac73f289cddbfd5c4b0dc
https://doi.org/10.1016/s0924-4247(01)00535-0
https://doi.org/10.1016/s0924-4247(01)00535-0
Publikováno v:
ResearcherID
Different actuator principles are rated with respect to an application as a loudspeaker in a hearing instrument. Fundamental rules are presented that have to be considered when different actuation principles are compared. A loudspeaker design using t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::825d259d49d9f2c52f2e616e9ffa18e8
https://doi.org/10.1088/0960-1317/11/4/308
https://doi.org/10.1088/0960-1317/11/4/308
Publikováno v:
Journal of Manufacturing Science and Engineering. 133
This paper presents a simple procedure for simultaneous cutting and forming of thin Al foils for use in MEMS components. The procedure makes use of scaled down macroscopic sheet forming and cutting techniques by using a hydraulic press, a soft counte
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::288214ed817eecc44dadcaead2c64f75
https://doi.org/10.1115/1.4003810
https://doi.org/10.1115/1.4003810
Autor:
Per F. Hövesten, Lars Jørn Stenberg, Pietro Andreani, Erik Bruun, Pirmin Hermann Otto Rombach, Gino Rocca, Jelena Citakovic, Aart Zeger Van Halteren
Publikováno v:
ISSCC
Silicon MEMS microphones that offer small size, ease of integration with CMOS electronics, and the ability to withstand lead-free solder reflow cycles, are becoming increasingly popular for high-volume consumer electronic products, and are competing
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bccc3eccc5c104fefb3951fa24612fc1
https://doi.org/10.1109/isscc.2009.4977452
https://doi.org/10.1109/isscc.2009.4977452
Publikováno v:
Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090).
The first differential silicon microphone is presented. This capacitive working device consists of two backplates with a membrane in between. Due to the balanced arrangement the air gap can be minimized. Thus, a higher electrical field and sensitivit
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::36e09c32d30f4b3db98a394d4d65b3e0
https://doi.org/10.1109/memsys.2001.906474
https://doi.org/10.1109/memsys.2001.906474
Publikováno v:
Rombach, P, Müllenborn, M, Klein, U, Nielsen, L & Frehoff, R 1999, ' A low-voltage silicon condenser microphone for hearing instrument applications ', Acoustical Society of America. Journal, vol. 105, no. 2, pp. 997-997 . https://doi.org/10.1121/1.424815
Silicon microphones have been the subject of investigations since the early 1980s. Due to their poor performance, no silicon microphone for hearing instrument applications has been commercially available until today. Usually the sensitivity of the el
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::2825c1c39f67671442037f95c4c5c406
https://doi.org/10.1121/1.424815
https://doi.org/10.1121/1.424815
Publikováno v:
Technical University of Denmark Orbit
Materials and methods for low cost minimum volume protective encapsulation of microsystems have been investigated. The focus has been on a 3D conformal multilayer coating of silicon microphones. Materials with different properties, e.g. insulating an
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::1b6f8fece18cd2eeda4847bdef1df88d
https://orbit.dtu.dk/en/publications/1e28297c-d64b-4f8f-8be5-777f76f5fd97
https://orbit.dtu.dk/en/publications/1e28297c-d64b-4f8f-8be5-777f76f5fd97
