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Bimolecular Reaction Mechanism in the Amido Complex-Based Atomic Layer Deposition of HfO 2 .

Autor: D'Acunto G; Department of Physics, Division of Synchrotron Radiation Research, and NanoLund, Lund University, Box 118, 221 00 Lund, Sweden., Tsyshevsky R; Department of Materials Science and Engineering, University of Maryland, College Park, Maryland 20742, United States., Shayesteh P; Department of Physics, Division of Synchrotron Radiation Research, and NanoLund, Lund University, Box 118, 221 00 Lund, Sweden., Gallet JJ; CNRS Laboratoire de Chimie Physique-Matière et Rayonnement, Sorbonne Université, 4 place Jussieu, 75005 Paris, France.; Synchrotron SOLEIL, L'Orme des Merisiers, Saint-Aubin, BP 48, 91192 Gif-sur-Yvette Cedex, France., Bournel F; CNRS Laboratoire de Chimie Physique-Matière et Rayonnement, Sorbonne Université, 4 place Jussieu, 75005 Paris, France.; Synchrotron SOLEIL, L'Orme des Merisiers, Saint-Aubin, BP 48, 91192 Gif-sur-Yvette Cedex, France., Rochet F; CNRS Laboratoire de Chimie Physique-Matière et Rayonnement, Sorbonne Université, 4 place Jussieu, 75005 Paris, France., Pinsard I; Department of Physics, Division of Synchrotron Radiation Research, and NanoLund, Lund University, Box 118, 221 00 Lund, Sweden., Timm R; Department of Physics, Division of Synchrotron Radiation Research, and NanoLund, Lund University, Box 118, 221 00 Lund, Sweden., Head AR; Center for Functional Nanomaterials, Brookhaven National Laboratory, P.O. Box 5000, Upton, New York 11973-5000, United States., Kuklja M; Department of Materials Science and Engineering, University of Maryland, College Park, Maryland 20742, United States., Schnadt J; Department of Physics, Division of Synchrotron Radiation Research, and NanoLund, Lund University, Box 118, 221 00 Lund, Sweden.; MAX IV Laboratory, Lund University, Box 118, 221 00 Lund, Sweden.

Publikováno v: Chemistry of materials : a publication of the American Chemical Society [Chem Mater] 2023 Jan 03; Vol. 35 (2), pp. 529-538. Date of Electronic Publication: 2023 Jan 03 (Print Publication: 2023).