Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Pin-Chia Liao"'
Autor:
Yu-Fang Tseng, Pin-Chia Liao, Po-Hsiung Chen, Tsai-Sheng Gau, Burn-Jeng Lin, Po-Wen Chiu, Jui-Hsiung Liu
Publikováno v:
Nanoscale Advances; 1/7/2024, Vol. 6 Issue 1, p197-208, 12p
Autor:
Pin-Chia Liao, Po-Hsiung Chen, Yu-Fang Tseng, Ting-An Shih, Ting-An Lin, Tsi-Sheng Gau, Burn-Jeng Lin, Po-Wen Chiu, Jui-Hsiung Liu
Publikováno v:
Journal of Materials Chemistry C. 10:15647-15655
Treatment of hafnium clusters Hf6O4(OH)4(RCO2)12 with LiOH in DCM/H2O afforded Hf6O4(OH)6(RCO2)10, using which high resolution EUV lithographic patterns can be achieved.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ce3b74bfd1c169ca15a07f8687b2d361
https://doi.org/10.1039/d2tc02912j
https://doi.org/10.1039/d2tc02912j